Tokyo Electron 5044-000387-11数字量控制板卡 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品名称:5044-000387-11 数字量控制板卡
制造商:Tokyo Electron Ltd.(东京电子)
产品类型:数字量控制板卡(Digital I/O Control Board)
一、产品概述
5044-000387-11 是 Tokyo Electron 半导体制造设备中使用的数字量控制板卡,主要用于数字信号的采集、处理和输出控制。它负责处理来自设备各类开关、传感器和执行机构的数字信号,完成自动化控制指令的执行。
二、主要功能
数字输入采集
采集来自传感器、按钮、限位开关等的开/关信号。
数字输出控制
控制继电器、电磁阀、指示灯等设备的开关动作。
信号隔离与保护
内置隔离电路和保护元件,确保设备安全运行。
通信接口
通过标准工业总线或专用接口与主控系统通信,传递状态和控制信息。
三、适用设备
该数字量控制板卡广泛应用于以下 Tokyo Electron 设备:
蚀刻设备(Etcher)
薄膜沉积设备(CVD/PVD)
涂胶显影设备(Coater/Developer)
晶圆搬运及传送系统
英文资料:
Product Name: 5044-000387-11 Digital Control Board
Manufacturer: Tokyo Electron Ltd
Product type: Digital I/O Control Board
1、 Product Overview
5044-000387-11 is a digital control board used in Tokyo Electron semiconductor manufacturing equipment, mainly for the acquisition, processing, and output control of digital signals. It is responsible for processing digital signals from various switches, sensors, and actuators of the equipment to complete the execution of automation control instructions.
2、 Main functions
Digital input acquisition
Collect on/off signals from sensors, buttons, limit switches, etc.
Digital output control
Control the switching actions of devices such as relays, solenoid valves, and indicator lights.
Signal isolation and protection
Built in isolation circuit and protective components ensure safe operation of the equipment.
communication interface
Communicate with the main control system through standard industrial buses or dedicated interfaces to transmit status and control information.
3、 Applicable equipment
This digital control board is widely used in the following Tokyo Electron devices:
Etcher equipment
Thin film deposition equipment (CVD/PVD)
Coater/Developer
Wafer handling and transportation system
2.产 品 展 示
3.其他产品
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6DD2920-0AV3 | CACR-PR01AC3ER | 44A751101-G01 |
6DD2920-0AV1 | CACR-UIR05050FD | 6ES5513-3LB11 |
6DD2920-0AV0 | 6SC6100-0NC11 | GDC806A0101 |
6DD2920-0AU1 | CACR-IR020202FC | UNS0119A-P,V101 |
6DD2920-0AU0 | CACR-SR30BE12G-E | 6ES5498-1AA51 |
6DD2920-0AS1 | CACR-IR44SEB | UCD240A101 |
6DD2920-0AS0 | CACR-A5-SU23GC | PPC902CE101 |