Tokyo Electron EC08-000016-11控制主板卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：EC08-000016-11 控制主板卡件
制造商：Tokyo Electron Ltd.（东京电子）
产品类型：控制主板卡件（Main Control Board / Controller PCB）
一、产品概述
EC08-000016-11 是 Tokyo Electron（TEL）半导体设备中关键的主控制板卡之一，通常作为子系统的核心控制模块，集成逻辑控制、I/O 管理、通信协调等功能。它用于协调多个执行元件（如阀门、电机、传感器等）的运行，是设备自动化控制的重要组成部分。
二、主要功能
子系统主控逻辑执行
搭载微控制器或 FPGA，运行设备特定控制程序，实现本地动作逻辑的闭环控制。
I/O 信号集中管理
采集数字/模拟输入信号（如温度、位置、气压等），输出控制指令至驱动器、继电器、执行机构。
通信接口管理
与上位主控系统或其他模块通信（如 RS-232、CAN、以太网、TEL 专有协议等），协调工艺流程。
状态监控与报警反馈
支持实时故障检测、LED 状态指示、异常报警反馈。
三、适用设备范围
EC08-000016-11 控制主板广泛应用于以下 Tokyo Electron 系统的子模块控制中：
涂胶显影设备（Coater/Developer）
薄膜沉积系统（CVD、PVD）
蚀刻系统（Etcher）
真空/气体处理系统
机械动作子系统（如晶圆传送臂、升降平台等）
英文资料：
Product Name: EC08-000016-11 Control Motherboard Card
Manufacturer: Tokyo Electron Ltd
Product Type: Main Control Board/Controller PCB
1、 Product Overview
EC08-000016-11 is one of the key main control boards in Tokyo Electron (TEL) semiconductor equipment, typically serving as the core control module of subsystems, integrating functions such as logic control, I/O management, and communication coordination. It is used to coordinate the operation of multiple executing components (such as valves, motors, sensors, etc.) and is an important component of equipment automation control.
2、 Main functions
Subsystem main control logic execution
Equipped with a microcontroller or FPGA, running device specific control programs to achieve closed-loop control of local action logic.
Centralized management of I/O signals
Collect digital/analog input signals (such as temperature, position, air pressure, etc.) and output control commands to drivers, relays, and actuators.
Communication interface management
Communicate with the upper control system or other modules (such as RS-232, CAN, Ethernet, TEL proprietary protocols, etc.) to coordinate the process flow.
Status monitoring and alarm feedback
Support real-time fault detection, LED status indication, and abnormal alarm feedback.
3、 Applicable equipment scope
The EC08-0000016-11 control motherboard is widely used in the submodule control of the following Tokyo Electron systems:
Coater/Developer
Thin film deposition system (CVD, PVD)
Etcher system
Vacuum/Gas Processing System
Mechanical action subsystems (such as wafer transfer arms, lifting platforms, etc.)
2.产 品 展 示
3.其他产品
4.其他英文产品
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