Tokyo Electron BX81-070103-13印刷电路板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品名称:BX81-070103-13 印刷电路板
制造商:Tokyo Electron Ltd.(东京电子)
产品类型:印刷电路板(PCB, Printed Circuit Board)
一、产品概述
BX81-070103-13 是 Tokyo Electron 半导体设备中使用的一种专用 印刷电路板模块,主要用于信号处理、设备控制、系统通信或输入输出管理等功能。它作为电子系统中的关键部分,通常被集成于设备的控制主板系统、I/O 子模块或通信框架中。
二、主要功能
信号传输与处理
承载并连接多个电子元件(如电容、电阻、芯片、接头),实现电气信号的采集、传输与处理。
设备通信接口支持
提供与其他模块或主控系统之间的标准通信或数据交互接口,如 RS232、CAN、TTL 等。
系统控制逻辑承载
某些 PCB 上集成控制逻辑、微控制器、FPGA 或通信驱动器,负责子系统运行指令的具体执行。
三、适用设备范围
该 PCB 常用于以下 TEL 半导体生产设备中:
蚀刻机(Etcher)
CVD/PVD 设备(薄膜沉积系统)
涂胶显影设备(Coater/Developer)
真空腔体控制系统、干燥/清洗模块等子系统
英文资料:
Product Name: BX81-070103-13 Printed Circuit Board
Manufacturer: Tokyo Electron Ltd
Product type: Printed Circuit Board (PCB)
1、 Product Overview
BX81-070103-13 is a specialized printed circuit board module used in Tokyo Electron semiconductor equipment, mainly for functions such as signal processing, device control, system communication, or input-output management. As a critical component in electronic systems, it is usually integrated into the control motherboard system, I/O submodule, or communication framework of the device.
2、 Main functions
Signal transmission and processing
Carrying and connecting multiple electronic components (such as capacitors, resistors, chips, and connectors) to achieve the acquisition, transmission, and processing of electrical signals.
Device communication interface support
Provide standard communication or data exchange interfaces with other modules or main control systems, such as RS232, CAN, TTL, etc.
System control logic carrier
Some PCBs integrate control logic, microcontrollers, FPGAs, or communication drivers, responsible for the specific execution of subsystem operating instructions.
3、 Applicable equipment scope
This PCB is commonly used in the following TEL semiconductor production equipment:
Etcher (Etcher)
CVD/PVD equipment (thin film deposition system)
Coater/Developer
Subsystems such as vacuum chamber control system, drying/cleaning module, etc
2.产 品 展 示
3.其他产品
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