Tokyo Electron 909-031-PLC4A电源模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品名称:909-031-PLC4A 电源模块
制造商:Tokyo Electron Ltd.(东京电子)
产品类型:电源模块(Power Supply Module)
一、产品概述
909-031-PLC4A 是一款用于 Tokyo Electron 半导体设备中的专用电源模块,主要为设备中的控制板、接口模块、传感器或执行部件等提供稳定的直流电源供应。它通常部署在控制机架、电源分配柜或模块化框架中,是关键的基础硬件之一。
二、主要功能
直流稳压供电
将交流输入或高压直流变换为设备所需的稳定低压直流输出,如 5V / 12V / 24V DC。
过载与短路保护
内置保护电路,有效防止电压过冲、短路或电流过载引发的故障。
支持多点供电
可同时为多个子模块或子系统供电,提供多个输出通道。
设备运行指示
设有状态指示灯(如 Power OK、Fault 等),便于监控运行状态。
三、典型应用设备
该电源模块适用于以下 TEL 半导体制造设备中的电源系统:
Etcher 系列蚀刻设备
CVD/PVD 真空薄膜设备
涂胶显影设备(Coater/Developer)
清洗与热处理设备
英文资料:
Product Name: 909-031-PLC4A Power Module
Manufacturer: Tokyo Electron Ltd
Product type: Power Supply Module
1、 Product Overview
909-031-PLC4A is a dedicated power module used in Tokyo Electron semiconductor equipment, mainly providing stable DC power supply for control boards, interface modules, sensors, or execution components in the equipment. It is typically deployed in control racks, power distribution cabinets, or modular frameworks and is one of the key foundational hardware components.
2、 Main functions
DC stabilized power supply
Convert AC input or high voltage DC into stable low voltage DC output required by the equipment, such as 5V/12V/24V DC.
Overload and short circuit protection
Built in protection circuit effectively prevents faults caused by voltage overshoot, short circuit, or current overload.
Support multi-point power supply
It can simultaneously supply power to multiple sub modules or subsystems, providing multiple output channels.
Equipment operation indication
Equipped with status indicator lights (such as Power OK, Fault, etc.) for easy monitoring of operational status.
3、 Typical application devices
This power module is suitable for power systems in the following TEL semiconductor manufacturing equipment:
Etcher series etching equipment
CVD/PVD vacuum film equipment
Coater/Developer
Cleaning and heat treatment equipment
2.产 品 展 示
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