Tokyo Electron 381-639006-5限制板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：381-639006-5
产品名称：限制板（Interlock Board / Limit Board）
制造商：Tokyo Electron Ltd.（东京电子）
部件类别：安全联锁与保护模块
应用设备：广泛用于 Tokyo Electron 各类半导体制造设备中，尤其是蚀刻机、CVD、清洗设备等。
二、功能定位
安全联锁功能
监控设备关键部件的状态（如门锁、压力、温度极限等），确保设备运行安全。
当检测到异常或危险状态时，立即发出停止信号，切断关键控制回路，防止事故发生。
状态检测与反馈
对关键传感器信号进行采集和逻辑判断，反馈设备主控制器或报警系统。
防止未经许可的操作或异常工况。
故障保护
处理急停按钮、紧急关断信号等，执行快速断电或关机保护动作。
实现设备的安全联锁链条，确保人机和设备安全。
三、应用领域
半导体制造工艺设备
监控设备腔体门、真空泵状态、气体供应状态、加热系统极限等。
设备安全联锁系统
作为多重安全防护环节，确保设备操作人员安全和工艺安全。
紧急保护系统
快速响应异常事件，触发联锁，保护设备及工艺环境。
英文资料：
1、 Basic Information
Product model: 381-639006-5
Product Name: Interlock Board/Limit Board
Manufacturer: Tokyo Electron Ltd
Component Category: Safety Interlocking and Protection Module
Application equipment: Widely used in various semiconductor manufacturing equipment of Tokyo Electron, especially etching machines CVD、 Cleaning equipment, etc.
2、 Functional positioning
Safety interlock function
Monitor the status of key components of the equipment (such as door locks, pressure, temperature limits, etc.) to ensure safe operation of the equipment.
When an abnormal or dangerous state is detected, a stop signal is immediately issued to cut off the critical control circuit and prevent accidents from occurring.
Status detection and feedback
Collect and logically judge key sensor signals, and provide feedback to the main controller or alarm system of the equipment.
Prevent unauthorized operations or abnormal working conditions.
Fault protection
Handle emergency stop buttons, emergency shutdown signals, etc., and perform quick power-off or shutdown protection actions.
Implement a safety interlock chain for the equipment to ensure the safety of both humans and equipment.
3、 Application Fields
Semiconductor manufacturing process equipment
Monitor equipment chamber doors, vacuum pump status, gas supply status, heating system limits, etc.
Equipment safety interlock system
As a multiple safety protection link, ensure the safety of equipment operators and process safety.
Emergency protection system
Quickly respond to abnormal events, trigger interlocks, and protect equipment and process environments.
2.产 品 展 示
3.其他产品
Intelligent Instrumentation TM2500-001B 终端操作面板
4.其他英文产品
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