Tokyo Electron 3T81-000051-11电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：3T81-000051-11
产品名称：电路板（Circuit Board / PCB）
制造商：Tokyo Electron Ltd.（东京电子）
部件类型：控制或接口类电路板
适用设备：常用于 TEL 的半导体工艺设备中，如蚀刻设备（Etcher）、化学气相沉积设备（CVD）、清洗设备、晶圆搬运系统等。
二、功能定位
信号处理与接口转换
用于不同模块之间的信号传输、电平匹配、滤波或隔离。
子系统控制辅助
可作为主控制模块与执行机构之间的桥接板，例如用于阀门控制、继电器驱动、传感器反馈处理等。
数据通信与中继
实现主控制器与多个外围模块之间的信号分配和通道调度。
设备运行状态监控
电路板上可能集成状态指示灯、报警电路或反馈检测功能。
三、应用领域
真空腔体控制系统：如监控气压、电极状态、等离子发生器接口等
气体输送与流量控制系统：接入质量流量计（MFC）、电磁阀等
温控或加热系统：连接热电偶、加热元件或冷却风扇
安全联锁与报警系统：用于控制门锁状态、温度/压力上限警报
四、技术特点（典型）
多层 PCB 结构，支持模拟/数字混合信号
光电隔离设计，增强抗干扰性能
插拔式或背板连接，便于模块化更换
与 TEL 专用控制架构和标准接口兼容
工业级用料，支持 24/7 工作环境、耐高温与防静电
英文资料：
1、 Basic Information
Product model: 3T81-000051-11
Product Name: Circuit Board/PCB
Manufacturer: Tokyo Electron Ltd
Component type: Control or interface circuit board
Applicable equipment: Commonly used in TEL's semiconductor process equipment, such as etching equipment (Etcher), chemical vapor deposition equipment (CVD), cleaning equipment, wafer handling systems, etc.
2、 Functional positioning
Signal processing and interface conversion
Used for signal transmission, level matching, filtering, or isolation between different modules.
Subsystem Control Assistance
It can serve as a bridge board between the main control module and the actuator, such as for valve control, relay drive, sensor feedback processing, etc.
Data Communication and Relay
Implement signal distribution and channel scheduling between the main controller and multiple peripheral modules.
Equipment operation status monitoring
Status indicator lights, alarm circuits, or feedback detection functions may be integrated on the circuit board.
3、 Application Fields
Vacuum chamber control system: such as monitoring air pressure, electrode status, plasma generator interface, etc
Gas delivery and flow control system: connected to mass flow meters (MFCs), solenoid valves, etc
Temperature control or heating system: connect thermocouples, heating elements, or cooling fans
Safety interlock and alarm system: used to control door lock status, temperature/pressure upper limit alarm
4、 Technical characteristics (typical)
Multi layer PCB structure, supporting mixed analog/digital signals
Optoelectronic isolation design enhances anti-interference performance
Plug in or backplane connection for modular replacement
Compatible with TEL dedicated control architecture and standard interfaces
Industrial grade materials, supporting 24/7 working environment, high temperature resistance and anti-static
2.产 品 展 示
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