Tokyo Electron CX81-050023-12输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：CX81-050023-12
产品名称：输入输出模块（Input/Output Module）
制造商：Tokyo Electron Ltd.（东京电子）
模块类型：多通道数字/模拟 I/O 模块
所属设备：常用于 Tokyo Electron 半导体制造设备中的控制系统，如蚀刻机、清洗机、薄膜沉积设备（CVD、PVD）等。
二、功能定位
设备信号输入/输出接口
接收来自设备传感器、按钮、开关等的输入信号
输出控制命令至执行部件，如阀门、电磁继电器、风扇、泵等
主控系统与现场设备之间的桥梁
连接 TEL 的主控制器（如 PLC 或控制主板）与实际工艺模块，实现控制逻辑落地
状态采集与逻辑驱动
用于采集开关量（DI）、输出继电控制信号（DO），或处理模拟量信号（AI/AO）
支持部分信号冗余或状态反馈功能
三、典型应用领域
工艺过程控制（Etch/CVD）
控制气体面板、加热器、冷却风扇、真空泵等部件的启动/停止
采集温度开关、门锁状态、传感器报警、腔体真空状态等输入信号
自动化搬送系统
控制机械臂、传送带、升降平台等动作指令
接收位置、限位、气压等状态反馈信号
报警与联锁系统
输出声光报警
执行紧急停机、联锁保护等动作控制
英文资料：
1、 Basic Information
Product model: CX81-050023-12
Product Name: Input/Output Module
Manufacturer: Tokyo Electron Ltd
Module type: Multi channel digital/analog I/O module
Equipment: Control systems commonly used in Tokyo Electron semiconductor manufacturing equipment, such as etching machines, cleaning machines, thin film deposition equipment (CVD, PVD), etc.
2、 Functional positioning
Equipment signal input/output interface
Receive input signals from device sensors, buttons, switches, etc
Output control commands to executing components such as valves, electromagnetic relays, fans, pumps, etc
The bridge between the main control system and the on-site equipment
Connect the main controller of TEL (such as PLC or control motherboard) with the actual process module to achieve the implementation of control logic
State acquisition and logic drive
Used for collecting switch signals (DI), outputting relay control signals (DO), or processing analog signals (AI/AO)
Support partial signal redundancy or status feedback function
3、 Typical application areas
Process Control (Etch/CVD)
Control the start/stop of components such as gas panels, heaters, cooling fans, vacuum pumps, etc
Collect input signals such as temperature switch, door lock status, sensor alarm, and chamber vacuum status
Automated transportation system
Control the motion commands of robotic arms, conveyor belts, lifting platforms, etc
Receive status feedback signals such as position, limit, and air pressure
Alarm and interlocking system
Output sound and light alarm
Execute emergency shutdown, interlock protection and other action control
2.产 品 展 示
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