TEL Tokyo Electron EC49-000005-11 数字电子显示器 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron EC49-000005-11
产品类型： 数字电子显示器（Digital Electronic Display）
功能定位： 作为半导体设备的状态指示与参数显示终端，实现人机界面数据的实时输出
一、产品功能概述：
EC49-000005-11 数字电子显示器是 Tokyo Electron（TEL）为其各类半导体设备配置的可视化输出组件，主要用于实时显示设备运行状态、工艺参数、报警信息和操作提示。该显示器通常安装于设备前端面板、操作台或子系统机架上，具备高亮度、良好对比度和稳定的电磁兼容性能。
二、主要应用领域：
工艺数据实时显示
显示关键工艺参数，如温度、流量、压力、气体比率、电源功率等，提升操作直观性。
设备运行状态提示
实时反馈设备运行状态（如 Processing、Idle、Error），帮助操作人员快速判断系统状态。
报警信息与故障代码输出
显示设备错误码、警报内容，辅助维护人员进行故障诊断与排查。
人机界面（HMI）终端扩展
与主控系统联动，实现信息的集中管理和多终端分布显示。
模块化控制系统集成
可作为局部控制单元的显示组件使用，提升子系统独立性和模块化水平。
英文资料：
Product model: TEL Tokyo Electron 1B80-001310-11
Product type: Control Pulse Board/Pulse Control Card
Functional positioning: A functional module used in semiconductor equipment to output precise control pulse signals, driving key actuators to operate at a set pace
1、 Product Function Overview:
The 1B80-001310-11 control pulse card is a precision control module developed by Tokyo Electron (TEL) for its automated process equipment, specifically designed to generate, modulate, and output control pulse signals with strong timing. It is usually applied in subsystems with strict requirements for pulse width, frequency, and timing, such as stepper motor drive, solenoid valve control, and RF power triggering, to ensure high-precision execution of equipment in nanoseconds/milliseconds.
2、 Main application areas:
Precision stepper or servo control system
Output control pulse signals to drive components such as robotic arms, turntables, or actuators, achieving micrometer level precision positioning.
RF/plasma power trigger
Send synchronous pulse signals to modules such as RF power supply and plasma source to ensure coordinated execution between process steps.
Electromagnetic valves and process gas control
Control highly responsive solenoid valve switches, regulate gas flow or reaction chamber pressure, and achieve fast switch response.
Process sequence timing control
Provide timing control pulses in processes such as cleaning, etching, and deposition to coordinate the precise triggering of each action unit.
Equipment synchronization control and interface expansion
Communicate with the main control system and coordinate multiple module actions to achieve hardware cascade synchronization between modules.
2.产 品 展 示
3.其他产品
KOLLMORGEN CP310250 PRD-P310250Z-55 伺服驱动器
4.其他英文产品
ASEA DSQC223 Robot Control Board
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| K32HCHM-LEK-M2-01 | SBD4-45-2101-4235DA2 | TRICONEX 8305A |
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