TEL Tokyo Electron 1B80-001310-11控制脉冲卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 1B80-001310-11
产品类型： 控制脉冲卡件（Control Pulse Board / Pulse Control Card）
功能定位： 半导体设备中用于输出精确控制脉冲信号的功能模块，驱动关键执行机构按设定节拍运作
一、产品功能概述：
1B80-001310-11 控制脉冲卡件是 Tokyo Electron（TEL）为其自动化工艺设备开发的精密控制模块，专门用于生成、调制和输出时序性强的控制脉冲信号。它通常应用于步进电机驱动、电磁阀控制、射频电源触发等对脉冲宽度、频率和时序有严格要求的子系统中，确保设备在纳秒/毫秒级别内进行高精度执行。
二、主要应用领域：
精密步进或伺服控制系统
输出控制脉冲信号以驱动机械手、转台或执行器等组件，实现微米级精度定位。
射频/等离子电源触发
对 RF 电源、等离子源等模块发出同步脉冲信号，保障工艺步骤间协调执行。
电磁阀与工艺气体控制
控制高响应性的电磁阀开关，调节气体流量或反应腔体压力，实现快速开关响应。
工艺序列时序控制
在清洗、刻蚀、沉积等流程中提供时序控制脉冲，协调各动作单元的精确触发。
设备同步控制与接口扩展
与主控系统通信并配合多个模块动作，实现模块之间的硬件级联同步。
英文资料：
Product model: TEL Tokyo Electron 1B80-001310-11
Product type: Control Pulse Board/Pulse Control Card
Functional positioning: A functional module used in semiconductor equipment to output precise control pulse signals, driving key actuators to operate at a set pace
1、 Product Function Overview:
The 1B80-001310-11 control pulse card is a precision control module developed by Tokyo Electron (TEL) for its automated process equipment, specifically designed to generate, modulate, and output control pulse signals with strong timing. It is usually applied in subsystems with strict requirements for pulse width, frequency, and timing, such as stepper motor drive, solenoid valve control, and RF power triggering, to ensure high-precision execution of equipment in nanoseconds/milliseconds.
2、 Main application areas:
Precision stepper or servo control system
Output control pulse signals to drive components such as robotic arms, turntables, or actuators, achieving micrometer level precision positioning.
RF/plasma power trigger
Send synchronous pulse signals to modules such as RF power supply and plasma source to ensure coordinated execution between process steps.
Electromagnetic valves and process gas control
Control highly responsive solenoid valve switches, regulate gas flow or reaction chamber pressure, and achieve fast switch response.
Process sequence timing control
Provide timing control pulses in processes such as cleaning, etching, and deposition to coordinate the precise triggering of each action unit.
Equipment synchronization control and interface expansion
Communicate with the main control system and coordinate multiple module actions to achieve hardware cascade synchronization between modules.
2.产 品 展 示
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