TEL Tokyo Electron 381-640804-9显示板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 381-640804-9
产品类型： 显示板（Display Board）
功能定位： 半导体设备中用于图形化信息输出、人机界面交互和运行状态显示的关键模块
一、产品功能概述：
381-640804-9 显示板是 Tokyo Electron（TEL）为其高端半导体制造设备设计的专用信息可视化模块。该显示板可连接液晶或LED显示屏，用于实时显示设备运行状态、工艺参数、报警信息以及用户操作界面。其设计满足洁净室设备高稳定性、高可靠性的要求，支持多种通信协议与主控系统对接。
二、主要应用领域：
工艺参数可视化显示
显示温度、压力、气体流量、运行步骤、真空状态等工艺关键数据。
设备状态与报警信息提示
实时输出运行状态（如 idle、process、error），支持多级报警显示和代码提示功能。
人机交互支持（HMI）
配合触控操作屏或按钮面板，实现参数设定、菜单浏览、启动/停止控制等交互功能。
系统诊断与维护提示
显示系统自检结果、日志信息和维护建议，提升设备故障排查效率。
通信与控制接口
与主控系统通过RS-232、CAN、以太网或专用协议通信，作为状态反馈与指令回显终端。
英文资料：
Product model: TEL Tokyo Electron 381-640804-9
Product type: Display Board
Functional positioning: A key module in semiconductor equipment used for graphical information output, human-computer interface interaction, and operational status display
1、 Product Function Overview:
The 381-640804-9 display board is a specialized information visualization module designed by Tokyo Electron (TEL) for its high-end semiconductor manufacturing equipment. This display panel can be connected to LCD or LED screens for real-time display of device operating status, process parameters, alarm information, and user interface. Its design meets the requirements of high stability and reliability of clean room equipment, and supports multiple communication protocols and integration with the main control system.
2、 Main application areas:
Visualization display of process parameters
Display key process data such as temperature, pressure, gas flow rate, operating steps, and vacuum status.
Equipment status and alarm information prompt
Real time output of operating status (such as idle, process, error), supporting multi-level alarm display and code prompt functions.
Human Machine Interaction Support (HMI)
Cooperate with the touch control screen or button panel to achieve interactive functions such as parameter setting, menu browsing, start/stop control, etc.
System diagnosis and maintenance prompts
Display system self-test results, log information, and maintenance suggestions to improve equipment troubleshooting efficiency.
Communication and Control Interface
Communicate with the main control system through RS-232, CAN, Ethernet, or dedicated protocols as a status feedback and command display terminal.
2.产 品 展 示
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