TEL Tokyo Electron XPC-T0068A-11连接臂模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron XPC-T0068A-11
产品类型： 连接臂模块（Connection Arm Module / Robotic Arm Link Module）
功能定位： 用于半导体设备中传输、搬运或支撑机械结构之间的连接组件
一、产品功能概述：
XPC-T0068A-11 连接臂模块是 Tokyo Electron（TEL）专为其晶圆搬运或真空机械臂系统开发的结构部件，通常作为机器人或自动化搬运机构中的中继臂或连接臂段，负责将执行器、末端抓取机构与驱动源连接起来，支持精准传动、灵活旋转和空间位移。
二、主要应用领域：
晶圆搬运系统
用于将晶圆从一个工艺腔体搬运至另一个位置（如从清洗段送至刻蚀腔、或从Load Port转移至真空腔）。
真空腔体内机械臂系统
作为机械臂内部结构的一部分，配合真空兼容电机与编码器，实现高精度、无尘环境下的移动动作。
模块化机械传动结构
与多关节机械手组件协同工作，实现多自由度的轨迹控制和工艺对位。
设备空间结构支撑
担任连接多个结构件之间的桥梁，同时承受机械应力、动态负载和设备运动过程中的惯性冲击。
设备自动化升级与维护
提供标准化、易更换的机械接口，适用于系统维护、臂长调整或功能模块扩展。
三、典型适用设备：
TEL ACT / Clean Track 系列晶圆处理设备
TEL Trias 系列薄膜沉积设备（CVD/PVD）
TEL Unity / Expedius 晶圆刻蚀与清洗系统
TEL Alpha 系列扩散炉的自动装载单元
英文资料：
Product model: TEL Tokyo Electron XPC-T0068A-11
Product type: Connection Arm Module/Robotic Arm Link Module
Functional positioning: Used as a connecting component between mechanical structures for transmission, handling, or support in semiconductor equipment
1、 Product Function Overview:
The XPC-T0068A-11 connecting arm module is a structural component developed by Tokyo Electron (TEL) specifically for its wafer handling or vacuum robotic arm systems. It is typically used as a relay arm or connecting arm segment in robots or automated handling mechanisms, responsible for connecting actuators, end effector mechanisms, and drive sources, supporting precise transmission, flexible rotation, and spatial displacement.
2、 Main application areas:
Wafer handling system
Used to transport wafers from one process chamber to another location (such as from a cleaning section to an etching chamber, or from a load port to a vacuum chamber).
Mechanical arm system inside vacuum chamber
As a part of the internal structure of the robotic arm, coupled with vacuum compatible motors and encoders, it achieves high-precision and dust-free movement movements.
Modular mechanical transmission structure
Collaborate with multi joint robotic arm components to achieve multi degree of freedom trajectory control and process alignment.
Equipment spatial structure support
Serve as a bridge connecting multiple structural components, while withstanding mechanical stress, dynamic loads, and inertial impacts during equipment movement.
Equipment automation upgrade and maintenance
Provide standardized and easily replaceable mechanical interfaces, suitable for system maintenance, arm length adjustment, or functional module expansion.
3、 Typical applicable equipment:
TEL ACT/Clean Track series wafer processing equipment
TEL Trias series thin film deposition equipment (CVD/PVD)
TEL Unity/Expedias wafer etching and cleaning system
Automatic loading unit of TEL Alpha series diffusion furnace
2.产 品 展 示
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| PC833-001-F | 6SC6108-0SG01 | 57310001-KY DSCL110A ABB |
| PC833-001-A | AMAT 0100-20416 | HESG447427R0001 70EI05A-E |
| PC832-XYZ-T |  AMAT 0100-90659 | 57330001-Y DSBB110A ABB |
| PC832-XYZ-N | AMAT 0100-91040 | NFTP01 |
| PC832-XYZ-A | AMAT 0100-00120 | HESG332194R0001 70BK06A-E |
| PC832-111-N-4122-11 | AMAT 0100-09034 | HESG447440R0003 RS422/485 70BK03C-E |
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