TEL Tokyo Electron 3D81-000099-V1控制主板卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 3D81-000099-V1
产品类型： 控制主板卡件（Main Controller Board）
功能定位： 半导体设备核心控制平台，用于协调工艺执行、设备通讯与状态管理
一、产品功能概述：
3D81-000099-V1 控制主板卡件是 Tokyo Electron（TEL）为其高端半导体设备定制开发的主要控制电路板之一，承担设备运行的核心逻辑处理、子系统协调控制和信号通信等关键功能。该卡件通常作为控制系统中的主控单元，与输入/输出模块、传感器接口、电源模块及人机界面进行联动，确保设备工艺流程稳定高效地运行。
二、主要应用领域：
半导体工艺设备主控平台
应用于刻蚀设备（Etcher）、CVD/PVD 薄膜设备、扩散炉及清洗系统等，用作系统中央控制器。
工艺流程控制与逻辑执行
运行嵌入式控制逻辑，精确执行温度控制、气体流量调节、阀门动作、机械臂控制等复杂任务。
设备模块通信与协同
与 I/O 卡件、传感器模块、执行器及上位控制系统（如PLC/HMI）进行高速数据通信与协调。
系统状态监测与报警
实时采集并分析各类运行状态数据，判断异常条件，输出报警信号并记录故障信息。
人机交互支持
配合图形化界面（触控屏/控制台）实现操作指令响应、工艺数据展示与参数调节功能。
英文资料：
Product model: TEL Tokyo Electron 3D81-000099-V1
Product type: Main Controller Board
Functional positioning: Core control platform for semiconductor equipment, used to coordinate process execution, equipment communication, and status management
1、 Product Function Overview:
The 3D81-000099-V1 control motherboard card is one of the main control circuit boards customized and developed by Tokyo Electron (TEL) for its high-end semiconductor equipment. It undertakes key functions such as core logic processing, subsystem coordination control, and signal communication for equipment operation. This card is usually used as the main control unit in the control system, linked with input/output modules, sensor interfaces, power modules, and human-machine interfaces to ensure stable and efficient operation of the equipment process flow.
2、 Main application areas:
Semiconductor process equipment main control platform
Used as a central controller for etching equipment (Etcher), CVD/PVD thin film equipment, diffusion furnaces, and cleaning systems.
Process control and logic execution
Run embedded control logic to accurately execute complex tasks such as temperature control, gas flow regulation, valve action, and robotic arm control.
Device module communication and collaboration
High speed data communication and coordination with I/O cards, sensor modules, actuators, and upper control systems (such as PLC/HMI).
System status monitoring and alarm
Real time collection and analysis of various operational status data, identification of abnormal conditions, output of alarm signals, and recording of fault information.
Human computer interaction support
Cooperate with graphical interfaces (touch screen/console) to achieve operation command response, process data display, and parameter adjustment functions.
2.产 品 展 示
3.其他产品
Kollmorgen MMC-SD-0.5-230-D伺服驱动器
4.其他英文产品
Asea EB0524B01 driver input power board
ABB UN1024c-P Remote Terminal Module
ABB 70BK03c-E Control I/O Module
| PCE843-001-A |  6SC6100-0GC10 | MC-TAIH23 |
| PCE835-XYZ-T | 6SC6103-0SE31 | MC-TAIH52 |
| PCE835-XYZ-N | 6SC6100-0GE01 | MC-TAIH53 |
| PCE835-XYZ-A | 6SC6101-3B-Z | MC-TAIH62 |
| PCE835-001-T | 6SC9711-0BM0 | MC-PDOY22 80363975-150 |
| PCE835-001-N | 6SC6101-4A-Z | MC-PD1X02 |
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