TEL Tokyo Electron 381-639006-4输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 381-639006-4
产品类型： 输入输出模块（Input/Output Module，I/O Module）
功能定位： 实现设备与外部传感器、执行器之间的信号交换和控制
一、产品功能概述：
381-639006-4 输入输出模块是 Tokyo Electron（TEL）设计用于半导体制造设备的关键接口单元。它负责采集设备现场的各种输入信号（数字量、模拟量），并将处理后的控制信号输出至执行机构，如阀门、泵、马达等，实现设备工艺流程的自动化控制。
二、主要应用领域：
半导体工艺设备信号接口
用于刻蚀机、CVD、PVD、扩散炉、清洗设备等，实现设备主控系统与现场传感器、执行器的连接。
数字量和模拟量信号处理
支持多通道数字输入（DI）、数字输出（DO）、模拟输入（AI）、模拟输出（AO），实现工艺参数采集与控制。
工艺流程自动化控制
协助主控处理器实现阀门控制、泵浦调节、马达驱动及工艺状态监测，确保工艺稳定与精确。
设备状态监测与报警
通过输入信号采集，实现设备运行状态实时监控和故障报警，提高设备安全性和可靠性。
模块化系统集成
作为设备控制架构的重要组成部分，支持与其他模块的高速通信和数据交换。
英文资料：
Product model: TEL Tokyo Electron 381-639006-4
Product type: Input/Output Module (I/O Module)
Functional positioning: realizing signal exchange and control between devices and external sensors and actuators
1、 Product Function Overview:
The 381-639006-4 input/output module is a key interface unit designed by Tokyo Electron (TEL) for semiconductor manufacturing equipment. It is responsible for collecting various input signals (digital and analog) from the equipment site, and outputting the processed control signals to actuators such as valves, pumps, motors, etc., to achieve automated control of the equipment process flow.
2、 Main application areas:
Semiconductor process equipment signal interface
Used for etching machines CVD、PVD、 The diffusion furnace, cleaning equipment, etc. are connected to the main control system of the equipment and the on-site sensors and actuators.
Digital and analog signal processing
Support multi-channel digital input (DI), digital output (DO), analog input (AI), and analog output (AO) to achieve process parameter acquisition and control.
Process automation control
Assist the main control processor in implementing valve control, pump regulation, motor drive, and process status monitoring to ensure process stability and accuracy.
Equipment status monitoring and alarm
By collecting input signals, real-time monitoring of equipment operation status and fault alarms can be achieved, improving equipment safety and reliability.
Modular system integration
As an important component of the device control architecture, it supports high-speed communication and data exchange with other modules.
2.产 品 展 示
3.其他产品
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4.其他英文产品
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