TEL Tokyo Electron 3181-060003-12电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 3181-060003-12
产品类型： 电路板（Circuit Board）
功能定位： 半导体设备中的电子控制与信号处理模块
一、产品功能概述：
3181-060003-12 电路板是 Tokyo Electron（TEL）为其半导体制造设备设计的一款关键电子控制单元。该电路板用于处理设备内部的控制信号和传感器数据，支持设备自动化运行及工艺参数调节，确保设备的高效稳定工作。
二、主要应用领域：
半导体制造设备控制系统
用于刻蚀、沉积、扩散、清洗等设备的信号处理与控制。
工艺参数采集与执行
处理温度、压力、流量等传感器信号，实现工艺参数的实时监控和调整。
设备子系统信号连接
实现设备内各子模块间的电气连接和信号传递。
模块化系统集成
作为模块化设备设计的一部分，支持多功能电路集成和协调工作。
设备维护与故障诊断
支持自诊断功能，提升设备运行可靠性和维护效率。
英文资料：
Product model: TEL Tokyo Electron 3208-0000048-12
Product type: Printed Circuit Board (PCB)
Functional positioning: Key electronic control and signal processing modules inside semiconductor manufacturing equipment
1、 Product Function Overview:
3208-000048-12 is a high-performance printed circuit board designed by Tokyo Electron (TEL) specifically for its semiconductor manufacturing equipment. This PCB is responsible for the transmission and processing of key control signals, supporting data exchange and electrical interface functions between multiple subsystems within the device, and is an important component of the electronic control system of the device.
2、 Main application areas:
Control system for semiconductor process equipment
Used in etching, deposition, diffusion, and cleaning equipment to transmit and process process process control signals.
Internal signal connection platform of the device
Implement electrical connections between the main control unit and I/O modules, sensors, and actuators.
Process parameter acquisition and adjustment circuit
Support the collection and processing of sensor signals such as temperature, pressure, and flow rate to assist in real-time monitoring of process parameters.
Modular equipment system integration
As part of the modular design of devices, achieve the integration and collaborative work of multifunctional circuits.
Equipment maintenance and diagnostic assistance
Integrating self diagnostic and protective circuits to enhance equipment reliability and maintenance efficiency.
2.产 品 展 示
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| PFVL141R | AMAT 0010-39911 | PFTL101A 1.0KN |
| PFVL141C | AMAT 0100-09108 | PFTL 101BE-20.0KN |
| PFVA401 | AMAT 0100-03776 | PFTL 101BER-10.0KN |
| PFTL301E | AMAT 0100-35279 | PFTL 201C-10.0KN |
| PFTL201DE | AMAT 0100-11018 | PFTL 201C-50.0KN |
| PFTL201D | AMAT 0100-09001 | PFTL 201DE-50.0KN |
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