TEL Tokyo Electron 3Z80-000665-V1控制盒 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 3Z80-000665-V1
产品类型： 控制盒（Control Box）
功能定位： 半导体制造设备中的集成控制单元，用于设备操作与信号管理
一、产品功能概述：
3Z80-000665-V1 控制盒是 Tokyo Electron（TEL）设计的一款集成电子控制装置，主要用于半导体设备的局部控制和信号集中管理。该控制盒集成了多路信号接口、开关控制、电源管理等功能，为设备子系统提供稳定的控制信号和操作接口。
二、主要应用领域：
半导体设备局部控制单元
在设备的特定区域（如气体供应、泵浦控制、阀门管理）实现集中控制和状态反馈。
信号接口与分配
集成多种数字和模拟信号接口，实现传感器信号采集和执行器控制信号的分发。
设备操作接口
配备按键、开关或指示灯，供现场操作人员进行设备的手动控制和状态监测。
电源管理
提供稳定的电源供应及保护，确保控制信号的可靠传输。
模块化设备系统集成
作为设备控制系统的组成部分，实现与主控系统和其他模块的通信协同。
英文资料：
Product model: TEL Tokyo Electron 3Z80-000665-V1
Product type: Control Box
Functional positioning: Integrated control unit in semiconductor manufacturing equipment, used for equipment operation and signal management
1、 Product Function Overview:
The 3Z80-000665-V1 control box is an integrated electronic control device designed by Tokyo Electron (TEL), mainly used for local control and centralized signal management of semiconductor equipment. This control box integrates multiple signal interfaces, switch control, power management and other functions, providing stable control signals and operation interfaces for equipment subsystems.
2、 Main application areas:
Local control unit for semiconductor equipment
Implement centralized control and status feedback in specific areas of the equipment, such as gas supply, pump control, and valve management.
Signal interface and allocation
Integrate multiple digital and analog signal interfaces to achieve sensor signal acquisition and actuator control signal distribution.
Equipment operation interface
Equipped with buttons, switches or indicator lights for on-site operators to manually control and monitor the status of the equipment.
Power management
Provide stable power supply and protection to ensure reliable transmission of control signals.
Modular equipment system integration
As a component of the device control system, it achieves communication and collaboration with the main control system and other modules.
2.产 品 展 示
3.其他产品
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| PMA23V-10100-00 | AMAT 0100-00177 | PFEA113 |
| PMA23D-00100-00 | AMAT 0100-35263 | PFTL 201D-100.0KN |
| PMA23C-01100-00 | AMAT 0100-09302 | PFEA113-IP65 3BSE050092R65 |
| PMA23B-00114-00 | AMAT 0100-00055 | PFTL101AE |
| PMA230-1050B-02 | AMAT 0100-A1201 | PFTL 101B-10.0KN |
| PMA22S-01100-00 | AMAT 0100-35069 | PFRL101C |
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