TEL Tokyo Electron 2180-020433-12数字量输入卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 2180-020433-12
产品类型： 数字量输入卡件（Digital Input Card）
功能定位： 用于采集设备现场的数字量信号，实现数字信号的传输和处理
一、产品功能概述：
2180-020433-12 数字量输入卡件是 Tokyo Electron（TEL）设计的关键输入模块，专门用于半导体设备中采集来自传感器、开关、继电器等数字量信号。该卡件负责将现场的开/关状态、脉冲信号等转换成可供控制系统处理的数字信号，实现设备的准确监控与控制。
二、主要应用领域：
现场设备状态采集
采集阀门开关状态、限位开关信号、光电传感器输出等数字量信息，实时反映设备运行状态。
工艺设备控制反馈
支持刻蚀机、沉积设备、扩散炉等半导体设备中关键动作点的数字信号采集，为主控系统提供精确的反馈数据。
设备联锁与安全控制
通过采集数字量信号，实现设备动作联锁、安全保护和报警触发等功能，保障设备及人员安全。
模块化控制系统接口
作为模块化控制架构的一部分，实现与主控板、PLC等控制单元的数据交互。
远程监控与维护支持
支持远程读取数字输入状态，实现设备运行监控和故障诊断。
三、典型适用设备：
TEL Unity 系列等离子刻蚀设备
TEL Trias 薄膜沉积系统
TEL Alpha 系列扩散炉设备
TEL Clean Track 晶圆处理及清洗设备
英文资料：
Product model: TEL Tokyo Electron 2180-020433-12
Product type: Digital Input Card
Functional positioning: Used for collecting digital signals from equipment on-site, realizing the transmission and processing of digital signals
1、 Product Function Overview:
The 2180-020433-12 digital input card is a key input module designed by Tokyo Electron (TEL), specifically designed for collecting digital signals from sensors, switches, relays, and other sources in semiconductor equipment. This card is responsible for converting the on-site on/off status, pulse signals, etc. into digital signals that can be processed by the control system, achieving accurate monitoring and control of the equipment.
2、 Main application areas:
On site equipment status collection
Collect digital information such as valve switch status, limit switch signals, and photoelectric sensor outputs to reflect the real-time operation status of the equipment.
Process equipment control feedback
Support digital signal acquisition of key action points in semiconductor equipment such as etching machines, deposition equipment, and diffusion furnaces, providing accurate feedback data for the main control system.
Equipment interlocking and safety control
By collecting digital signals, equipment interlocking, safety protection, and alarm triggering functions are achieved to ensure the safety of equipment and personnel.
Modular control system interface
As part of the modular control architecture, it enables data exchange with control units such as the main control board and PLC.
Remote monitoring and maintenance support
Support remote reading of digital input status to achieve device operation monitoring and fault diagnosis.
3、 Typical applicable equipment:
TEL Unity series plasma etching equipment
TEL Trias thin film deposition system
TEL Alpha series diffusion furnace equipment
TEL Clean Track wafer processing and cleaning equipment
2.产 品 展 示
3.其他产品
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| PMA42P-01100-00 | AMAT 0100-00005 | PFTL101AER-1.0KN 3BSE023011R1 1.0KN |
| PMA42P-00100-00 | AMAT 0100-02706 | PFEA112-IP65 3BSE050091R65 |
| PMA42N-10100-00 | AMAT 0100-09153 | PFTL 101A-0.5 |
| PMA42N-01100-00 | AMAT 0100-00048 | PFRL101A 0.5KN |
| PMA42N-00100-00 | AMAT 0100-01135 | PFRL101D |
| PMA42M-10100-00 | AMAT 0100-09041 | PFTL 101AE-0.5 |
| PMA42M-01100-00 | Amat 0100-03499 | PFTL 101BER-20.0KN |
| PMA42M-00100-00 | Amat 0100-35060 | PFTL 201DE-100.0KN |
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