TEL Tokyo Electron 3M80-002734-12处理器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 3M80-002734-12
产品类型： 处理器模块（Processor Module）
功能定位： 半导体制造设备的核心计算与控制单元，执行系统运算和设备协调控制
一、产品功能概述：
3M80-002734-12 是 Tokyo Electron（TEL）设计的嵌入式处理器模块，广泛应用于其各类半导体设备中。该模块负责执行设备的控制程序，处理来自传感器和I/O模块的数据，生成控制信号以驱动工艺执行单元，实现设备的自动化控制和工艺精准管理。
二、主要应用领域：
半导体工艺设备主控处理
应用于CVD、PVD、等离子刻蚀、扩散炉、清洗设备等，作为中央控制单元管理工艺流程和设备动作。
工艺流程管理与计算
运行嵌入式控制软件，处理复杂工艺参数，实时调节工艺环境（温度、压力、气体流量等）。
信号采集与反馈控制
处理I/O模块传回的多种传感器信号，进行数据分析，反馈控制指令，保障工艺稳定性。
设备子系统协调与通信
与其他模块（如I/O接口板、通信模块、显示终端）通讯，实现设备整体协调和信息同步。
设备状态监控与维护支持
记录设备运行状态和故障日志，支持远程诊断和维护，提高设备可靠性。
三、典型适用设备：
TEL Unity 系列等离子刻蚀设备
TEL Trias 薄膜沉积系统
TEL Alpha 系列扩散炉
TEL Clean Track 晶圆处理设备
英文资料：
Product model: TEL Tokyo Electron 3M80-002734-12
Product type: Processor Module
Functional positioning: The core computing and control unit of semiconductor manufacturing equipment, responsible for executing system operations and coordinating equipment control
1、 Product Function Overview:
3M80-002734-12 is an embedded processor module designed by Tokyo Electron (TEL) and widely used in various semiconductor devices. This module is responsible for executing the control program of the equipment, processing data from sensors and I/O modules, generating control signals to drive the process execution unit, achieving automated control of the equipment and precise process management.
2、 Main application areas:
Semiconductor process equipment main control processing
Applied to CVD, PVD, plasma etching, diffusion furnaces, cleaning equipment, etc., as a central control unit to manage process flow and equipment actions.
Process Management and Calculation
Run embedded control software to process complex process parameters and adjust the process environment in real-time (temperature, pressure, gas flow rate, etc.).
Signal acquisition and feedback control
Process various sensor signals returned by I/O modules, perform data analysis, provide feedback control instructions, and ensure process stability.
Equipment subsystem coordination and communication
Communicate with other modules (such as I/O interface board, communication module, display terminal) to achieve overall coordination and information synchronization of the device.
Equipment status monitoring and maintenance support
Record equipment operating status and fault logs, support remote diagnosis and maintenance, and improve equipment reliability.
3、 Typical applicable equipment:
TEL Unity series plasma etching equipment
TEL Trias thin film deposition system
TEL Alpha series diffusion furnace
TEL Clean Track wafer processing equipment
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA SNAT7600 driver control circuit board
ABB 3DDE300417 Input/Output Board
| PMA43P-10100-00 | AMAT 0100-09131 | PFTL101B-2.0KN 3BSE004185R1 2.0KN |
| PMA43P-00100-00 | IMMFP12 | PFTL101AE-0.5 3BSE004211R1 0.5 |
| PMA43N-Y0100-02 | AMAT 0100-76297 | PFTL201D |
| PMA43N-11100-00 | GJR5252100R0201 | PFTL101BER |
| PMA43N-10100-00 | IMFEC11 | PFTL101AER-2.0KN 3BSE023012R1 2.0KN |
| PMA43N-01100-00 | GJR5251300R0161 | PFTL101BER-2.0KN 3BSE023158R1 2.0KN |
| PMA43N-00100-00 | AMAT 0100-A2523 | PFTL101B |
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