TEL Tokyo Electron 2L81-050086-11控制脉冲卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 2L81-050086-11
产品类型： 控制脉冲卡件（Control Pulse Card）
功能定位： 半导体设备中用于脉冲信号生成与控制的关键模块
一、产品功能概述：
2L81-050086-11 控制脉冲卡件是 Tokyo Electron（TEL）为其半导体制造设备专门设计的一款电子控制模块，主要负责生成和调节控制脉冲信号，用于驱动设备中的马达、阀门、激光器等精密执行机构，实现高精度动作控制。
二、主要应用领域：
精密运动控制系统
控制步进电机、伺服电机等的脉冲输入，确保晶圆传送、对准机械臂、旋转平台等装置的准确定位与运动。
工艺设备动作同步控制
用于刻蚀机、CVD、PVD等设备中，协调多部件的动作时序，通过脉冲信号实现同步启动、停止及速度调节。
信号调节与放大
对外部控制信号进行整形、放大和隔离，保证脉冲信号的稳定性和抗干扰能力。
脉冲信号输出接口
提供标准化脉冲信号接口，与其他控制模块（如主控板、I/O模块）协同完成复杂动作控制。
设备维护与诊断
集成自诊断功能，监测脉冲信号的质量和输出状态，支持故障检测和维护管理。
英文资料：
Product model: TEL Tokyo Electron 2L81-050086-11
Product type: Control Pulse Card
Functional positioning: a key module used for pulse signal generation and control in semiconductor equipment
1、 Product Function Overview:
2L81-050086-11 Control Pulse Card is an electronic control module specially designed by Tokyo Electron (TEL) for its semiconductor manufacturing equipment. It is mainly responsible for generating and adjusting control pulse signals to drive precision actuators such as motors, valves, lasers, etc. in the equipment, achieving high-precision action control.
2、 Main application areas:
Precision motion control system
Control the pulse input of stepper motors, servo motors, etc. to ensure accurate positioning and movement of devices such as wafer transfer, alignment robotic arms, and rotating platforms.
Synchronization control of process equipment actions
Used in etching machines, CVD, PVD and other equipment to coordinate the action timing of multiple components, and achieve synchronous start, stop and speed adjustment through pulse signals.
Signal conditioning and amplification
Shape, amplify, and isolate external control signals to ensure the stability and anti-interference ability of pulse signals.
Pulse signal output interface
Provide standardized pulse signal interfaces to collaborate with other control modules (such as the main control board and I/O modules) to complete complex action control.
Equipment maintenance and diagnosis
Integrated self diagnostic function, monitoring the quality and output status of pulse signals, supporting fault detection and maintenance management.
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-11415 Digital Input Module
ABB XVC768117 Field Input/Output Module
| PMA45R-01100-00 | AMAT 0100-71282 | PFTL201C 20.0KN |
| PMA45R-00100-00 | IMHSS02 | M21NSXC-LNN-NS-02 |
| PMA45Q-10100-00 | AMAT 0100-20078 | P21NRXB-LNN-NS-00 |
| PMA45N-01100-00 | ICSA04B5 | N33HRFM-LNK-NS-00 |
| PMA45N-00100-00 | AMAT 0100-18039 | PFCL301E 0.5KN 3BSE016580R500 |
| PMA44R-1050B-08 | IMDSO02 | 3BHT100010R1 RF615 |
| PMA44R-10100-00 | 70 AS 41b-E | PFXC141 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
