TEL Tokyo Electron  3M81-040785-11印刷电路板 PDF资料 

1.产 品 资 料 介 绍：

中文资料：

产品型号： TEL Tokyo Electron 3M81-040785-11
产品类型： 印刷电路板（PCB，Printed Circuit Board）
功能定位： 用于半导体制造设备中的电子控制及信号处理模块

一、产品功能概述：

3M81-040785-11 是 Tokyo Electron（TEL）专为其半导体设备设计的高性能印刷电路板。该PCB承担信号传输、电源分配和控制逻辑处理等功能，是设备内部关键电子系统的重要组成部分。其设计满足洁净室环境对电气性能和可靠性的严格要求。

二、主要应用领域：

1. 半导体制造工艺设备内部电子模块

• 用于CVD、PVD、刻蚀、扩散及清洗设备的信号控制与处理，支持设备各功能单元间的通信与协调。

2. 工艺参数采集与控制电路

• 处理温度、压力、气体流量等传感器信号，实现工艺参数的实时监测与反馈调节。

3. 设备内部通信与接口平台

• 作为主控单元与I/O模块、传感器、执行器之间的连接桥梁，支持多种信号类型的转接和管理。

4. 模块化设备系统集成

• 支持设备中多块PCB的组合使用，实现复杂控制逻辑与系统扩展需求。

5. 设备维护与诊断辅助

• 集成诊断电路和保护机制，提高设备运行的稳定性与维护效率。

三、典型适用设备：

• TEL Trias 薄膜沉积设备

• TEL Unity 系列刻蚀设备

• TEL Alpha 系列扩散炉

• TEL Clean Track 晶圆处理及清洗设备

英文资料：

Product model: TEL Tokyo Electron 3M81-040785-11

Product type: Printed Circuit Board (PCB)

Functional positioning: Used for electronic control and signal processing modules in semiconductor manufacturing equipment

1、 Product Function Overview:

3M81-040785-11 is a high-performance printed circuit board designed by Tokyo Electron (TEL) specifically for its semiconductor equipment. This PCB undertakes functions such as signal transmission, power distribution, and control logic processing, and is an important component of the critical electronic system inside the equipment. Its design meets the strict requirements of clean room environment for electrical performance and reliability.

2、 Main application areas:

Internal electronic modules of semiconductor manufacturing process equipment

Used for signal control and processing of CVD, PVD, etching, diffusion, and cleaning equipment, supporting communication and coordination between various functional units of the equipment.

Process parameter acquisition and control circuit

Process sensor signals such as temperature, pressure, and gas flow rate to achieve real-time monitoring and feedback adjustment of process parameters.

Internal communication and interface platform of equipment

As a connecting bridge between the main control unit and I/O modules, sensors, and actuators, it supports the transfer and management of multiple signal types.

Modular equipment system integration

Support the combination of multiple PCBs in the device to achieve complex control logic and system expansion requirements.

Equipment maintenance and diagnostic assistance

Integrate diagnostic circuits and protection mechanisms to improve the stability and maintenance efficiency of equipment operation.

3、 Typical applicable equipment:

TEL Trias thin film deposition equipment

TEL Unity series etching equipment

TEL Alpha series diffusion furnace

TEL Clean Track wafer processing and cleaning equipment

2.产      品      展      示      

3.其他产品

ASEA YYT-102-D伺服控制板

ASEA YYT-102-D伺服控制板

ABB GVC703AE01可控硅IGCT卡

4.其他英文产品

GESVDU-1D-8946 Input/Output Module

REF615E-E HBFEAEAGABCCANC11E Measurement

AMAT 0190-11415 Digital Input Module

本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs

品牌：TEL Tokyo Electron  

型号：3M81-040785-11印刷电路板

质保：一年

成色：全新/二手

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