TEL Tokyo Electron 3D81-000039-V1控制器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 3D81-000039-V1
产品类型： 控制器板（Controller Board）
功能定位： 半导体制造设备中的核心控制模块，负责执行设备逻辑控制与信号管理
一、产品功能概述：
3D81-000039-V1 控制器板是 Tokyo Electron（TEL）针对半导体设备开发的一款功能集成高的控制模块。该板卡主要承担设备动作指令的处理、信号采集与分发、工艺流程管理和子系统之间的协调通信，是设备自动化控制系统的重要组成部分。
二、主要应用领域：
半导体制造设备主控制系统
用于刻蚀机、沉积设备、清洗机及扩散炉中，控制各类执行机构如阀门、电磁阀、马达及传感器等，实现精准的工艺操作。
设备信号采集与处理
采集数字量和模拟量输入信号，处理后反馈控制指令，保障工艺参数的实时调节与设备运行的稳定。
多模块通信协调
作为设备内部各子模块之间的通信桥梁，实现数据交换和运行状态同步，支持与上位控制系统的接口通信。
工艺流程逻辑执行
内置工艺逻辑程序，实现设备动作序列控制，支持复杂工艺步骤的自动化执行。
设备运行监测与安全保护
具备故障检测、自诊断和报警功能，保障设备运行安全及快速故障响应。
英文资料：
Product model: TEL Tokyo Electron 3D81-000039-V1
Product type: Controller Board
Functional positioning: The core control module in semiconductor manufacturing equipment, responsible for executing equipment logic control and signal management
1、 Product Function Overview:
The 3D81-000039-V1 controller board is a highly integrated control module developed by Tokyo Electron (TEL) for semiconductor devices. This board is mainly responsible for processing equipment action instructions, signal acquisition and distribution, process flow management, and coordinating communication between subsystems. It is an important component of the equipment automation control system.
2、 Main application areas:
Main control system for semiconductor manufacturing equipment
Used in etching machines, deposition equipment, cleaning machines, and diffusion furnaces to control various actuators such as valves, solenoid valves, motors, and sensors, achieving precise process operations.
Equipment signal acquisition and processing
Collect digital and analog input signals, process them and provide feedback control instructions to ensure real-time adjustment of process parameters and stable equipment operation.
Multi module communication coordination
As a communication bridge between various sub modules within the device, it enables data exchange and synchronization of operating status, and supports interface communication with the upper control system.
Process flow logic execution
Built in process logic program, realizing equipment action sequence control, supporting automated execution of complex process steps.
Equipment operation monitoring and safety protection
Equipped with fault detection, self diagnosis, and alarm functions, ensuring safe equipment operation and rapid fault response.
2.产 品 展 示
3.其他产品
4.其他英文产品
ASEA 57310256-BA circuit board
GESVDU-1D-8946 Input/Output Module
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| PMB11B-10Y14-04 | IMDSO15 | PFRL101C 2.0KN 3BSE023316R0002 |
| PMB11B-00114-00 | AMAT 0100-00001 | 5730030-US DSDP 110 |
| PMA67S-11100-00 | PMKHRMMCL10 | 57160001-ZB DSTD W120 |
| PMA67S-10100-00 | AMAT 0100-71304 | N33HRHJ-LEK-M2-00 |
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