TEL Tokyo Electron 2981-600652-W1控制主板卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 2981-600652-W1
产品类型： 控制主板卡件（Main Control Board / Controller PCB）
功能定位： 半导体设备中的中央控制电路板，负责整体设备运行管理、工艺控制与通信协调
一、产品功能概述：
2981-600652-W1 是 Tokyo Electron（TEL）面向其高端半导体制造设备开发的一款控制主板卡件，作为整机控制系统的核心，承担信号处理、逻辑运算、数据通信、指令分发等关键控制任务。该卡件通常安装于设备的主控机架中，并通过背板连接多个 I/O 模块、处理器模块、通信板等。
二、主要应用领域：
设备控制中心（Central Control Unit）
用于刻蚀机、沉积设备、清洗设备等多种 TEL 设备中，控制各个子系统的运行流程与状态反馈。
工艺执行逻辑管理
执行内嵌的控制程序，实现设备动作序列控制、工艺参数设定与动态调整，如温度、气体流量、腔压控制等。
多模块协调控制平台
与多块子卡（如I/O模块、电源控制模块、传感器接口板）协同工作，进行信号采集、分发和实时响应。
设备间通信接口核心
实现设备内部与外部的通信协调，如与上位机（HMI）、远程服务器、制造执行系统（MES）的指令通信。
人机交互控制
接收来自触控屏或本地控制终端的操作指令，并反馈工艺状态、告警信息、运行日志等数据。
自检与故障诊断功能
集成错误码管理、看门狗机制、硬件状态监测等功能，提升设备运行安全性与故障维护效率。
英文资料：
Product model: TEL Tokyo Electron 2981-600652-W1
Product Type: Main Control Board/Controller PCB
Functional positioning: The central control circuit board in semiconductor equipment, responsible for overall equipment operation management, process control, and communication coordination
1、 Product Function Overview:
2981-600652-W1 is a control motherboard card developed by Tokyo Electron (TEL) for its high-end semiconductor manufacturing equipment. As the core of the overall control system, it undertakes key control tasks such as signal processing, logic operations, data communication, and instruction distribution. This card is usually installed in the main control rack of the equipment and connected to multiple I/O modules, processor modules, communication boards, etc. through a backplane.
2、 Main application areas:
Central Control Unit
Used in various TEL devices such as etching machines, deposition equipment, cleaning equipment, etc., to control the operation process and status feedback of each subsystem.
Process execution logic management
Execute embedded control programs to achieve device action sequence control, process parameter setting, and dynamic adjustment, such as temperature, gas flow rate, chamber pressure control, etc.
Multi module coordinated control platform
Collaborate with multiple daughter cards (such as I/O modules, power control modules, sensor interface boards) to perform signal acquisition, distribution, and real-time response.
Core communication interface between devices
Realize communication and coordination between internal and external devices, such as instruction communication with the upper computer (HMI), remote server, and manufacturing execution system (MES).
Human-machine interaction control
Receive operation instructions from the touch screen or local control terminal, and provide feedback on process status, alarm information, operation logs, and other data.
Self check and fault diagnosis function
Integrate error code management, watchdog mechanism, hardware status monitoring and other functions to enhance device operation safety and fault maintenance efficiency.
2.产 品 展 示
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