TEL Tokyo Electron 1B80-002396-11阀门区域板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 1B80-002396-11
产品类型： 阀门区域板（Valve Area Board / Valve Manifold PCB）
功能定位： 控制与管理气体阀门或液体阀门的驱动与信号接口模块
一、产品功能概述：
1B80-002396-11 阀门区域板是 Tokyo Electron（TEL）应用于其半导体工艺设备中的专用控制板之一。该模块用于集中控制多个气体或液体阀门的开启、关闭动作，以及监控其状态信号反馈，主要配套使用于气体供应系统（GAS BOX）、化学供应系统（CUC）、真空控制系统等关键单元。
二、主要应用领域：
半导体设备气体/液体输送控制系统
控制CVD、Etcher、PVD等设备中用于输送化学气体（如SiH₄、NH₃、O₂等）或液体化学品的电磁阀、比例阀，确保工艺流程中材料按设定顺序与流量供应。
阀组集成控制平台
作为多个阀门的集成驱动接口，实现集中式控制与统一电源分配，降低布线复杂度，提高维护效率。
气路与液路自动化切换系统
应用于多种气体通道切换、备用气源转换、吹扫控制等工艺路径管理，确保系统运行安全可靠。
实时状态监测与报警反馈
采集阀门开关状态、压力传感器信号，结合主控系统对异常情况（如阀门卡滞、压力偏差）进行报警和停机保护。
设备联锁与工艺联动控制
与工艺控制程序联动，如工艺腔体的压力调节、电浆开启、清洗步骤等，通过阀门区域板触发必要的气体/液体控制动作。
英文资料：
Product model: TEL Tokyo Electron 1B80-002396-11
Product type: Valve Area Board/Valve Manifold PCB
Functional positioning: Drive and signal interface module for controlling and managing gas valves or liquid valves
1、 Product Function Overview:
The 1B80-002396-11 valve area board is one of the specialized control boards used by Tokyo Electron (TEL) in its semiconductor process equipment. This module is used to centrally control the opening and closing actions of multiple gas or liquid valves, as well as monitor their status signal feedback. It is mainly used in key units such as gas supply system (GAS BOX), chemical supply system (CUC), vacuum control system, etc.
2、 Main application areas:
Semiconductor equipment gas/liquid transport control system
Control the solenoid valves and proportional valves used in CVD, Etcher, PVD and other equipment to transport chemical gases (such as SiH ₄, NH ∝, O ₂, etc.) or liquid chemicals, ensuring that materials are supplied in the set order and flow rate during the process flow.
Valve group integrated control platform
As an integrated drive interface for multiple valves, it achieves centralized control and unified power distribution, reduces wiring complexity, and improves maintenance efficiency.
Automatic switching system for gas and liquid circuits
Applied to process path management such as gas channel switching, backup gas source conversion, and purge control, ensuring safe and reliable system operation.
Real time status monitoring and alarm feedback
Collect valve switch status and pressure sensor signals, and combine them with the main control system to provide alarm and shutdown protection for abnormal situations (such as valve jamming and pressure deviation).
Equipment interlocking and process linkage control
Linked with the process control program, such as pressure regulation of the process chamber, plasma opening, cleaning steps, etc., necessary gas/liquid control actions are triggered through the valve area plate.
2.产 品 展 示
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