TEL Tokyo Electron 3M80-003140-12 PCB板组件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron 3M80-003140-12
产品类型： PCB板组件（Printed Circuit Board Assembly）
功能定位： 半导体设备控制系统中的电子信号处理与通信模块
一、产品功能概述：
3M80-003140-12 是 Tokyo Electron（TEL）专为其先进半导体设备设计的一种集成式 PCB 板组件。该组件集成了多种功能电路，用于处理设备内部的信号采集、传输、转换和逻辑控制，属于设备控制系统的核心电子单元之一。
二、主要应用领域：
半导体制造设备的主控系统
该PCB板常用于CVD（化学气相沉积）、Etcher（等离子蚀刻）、PVD（物理气相沉积）、清洗设备和扩散炉等设备中，作为控制系统与各子系统之间的核心信号接口。
多功能信号处理平台
集成多路模拟与数字电路，处理温度、压力、气体流量等工艺参数的传感器信号，同时输出控制信号至执行元件如阀门、泵、马达。
设备模块通信与协调
用作设备中多个模块（如I/O模块、驱动板、电源管理板）之间的通信桥梁，协调动作与反馈，提高设备稳定性和响应速度。
晶圆搬运与精密控制系统
应用于晶圆传送、对准、夹持等精密机械系统的控制信号处理与状态反馈。
设备运行状态监测与诊断
实现对电路电压、电流、信号完整性等关键运行参数的检测，用于设备自诊断与远程维护支持。
英文资料：
Product model: TEL Tokyo Electron 3M80-003140-12
Product type: Printed Circuit Board Assembly
Functional positioning: Electronic signal processing and communication module in semiconductor equipment control system
1、 Product Function Overview:
3M80-003140-12 is an integrated PCB board component designed by Tokyo Electron (TEL) specifically for its advanced semiconductor equipment. This component integrates multiple functional circuits for signal acquisition, transmission, conversion, and logic control within the device, and is one of the core electronic units of the device control system.
2、 Main application areas:
The main control system of semiconductor manufacturing equipment
This PCB board is commonly used in CVD (chemical vapor deposition), Etcher (plasma etching), PVD (physical vapor deposition), cleaning equipment, and diffusion furnaces as the core signal interface between the control system and various subsystems.
Multi functional signal processing platform
Integrate multiple analog and digital circuits to process sensor signals for process parameters such as temperature, pressure, and gas flow rate, while outputting control signals to actuators such as valves, pumps, and motors.
Equipment module communication and coordination
Used as a communication bridge between multiple modules in the device, such as I/O modules, driver boards, and power management boards, to coordinate actions and feedback, improve device stability and response speed.
Wafer Handling and Precision Control System
Used for control signal processing and status feedback in precision mechanical systems such as wafer transfer, alignment, and clamping.
Equipment operation status monitoring and diagnosis
Realize the detection of key operating parameters such as circuit voltage, current, and signal integrity for equipment self diagnosis and remote maintenance support.
2.产 品 展 示
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