TEL Tokyo Electron MPC-T0070A-12输入输出模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron MPC-T0070A-12
产品类型： 输入输出模块（I/O Module）
功能定位： 控制系统与现场设备之间的信号通信接口组件
一、产品功能概述：
MPC-T0070A-12 是一款应用于 Tokyo Electron 半导体设备中的工业级 I/O 模块，用于实现主控系统（如控制主板、PLC、嵌入式控制单元）与各种执行元件、传感器之间的输入与输出信号交互。该模块通常安装在设备背板或控制机架中，作为信号转换和数据采集的桥梁。
二、典型应用领域：
半导体制造设备控制系统
安装在 TEL 的刻蚀机、沉积设备（CVD/PVD）、扩散炉、清洗设备等中，控制阀门、泵、传感器、马达等现场设备。
数字量与模拟量信号接口
具备多路 DI（数字输入）、DO（数字输出）、AI（模拟输入）、AO（模拟输出）通道，用于对设备各子系统状态的采集与控制信号的下发。
晶圆搬运与定位系统
用于晶圆传送臂、对准器、分选单元的动作控制和位置反馈，例如马达控制、光电感应、限位开关反馈等。
工艺参数监控
支持对温度、压力、气体流量等关键工艺参数的输入采集与报警判断，确保工艺执行的精度和安全性。
模块化控制系统接口
用于模块化系统之间的边界信号处理，如不同机架控制器之间的数据同步、逻辑判断等。
远程诊断与维护接口
通过该模块采集设备运行状态与错误码，支持上位机诊断系统实现远程报警、故障分析与维护提醒功能。
英文资料：
Product model: TEL Tokyo Electron MPC-T0070A-12
Product Type: I/O Module
Functional positioning: Signal communication interface component between control system and on-site equipment
1、 Product Function Overview:
MPC-T0070A-12 is an industrial grade I/O module used in Tokyo Electron semiconductor equipment to enable input and output signal interaction between main control systems (such as control boards, PLCs, embedded control units) and various actuators and sensors. This module is usually installed in the equipment backplane or control rack as a bridge for signal conversion and data acquisition.
2、 Typical application areas:
Semiconductor manufacturing equipment control system
Installed in TEL's etching machines, deposition equipment (CVD/PVD), diffusion furnaces, cleaning equipment, etc., it controls on-site equipment such as valves, pumps, sensors, motors, etc.
Interface between digital and analog signals
Equipped with multiple channels of DI (digital input), DO (digital output), AI (analog input), and AO (analog output), used for collecting and issuing control signals for the status of various subsystems of the equipment.
Wafer handling and positioning system
Used for motion control and position feedback of wafer transfer arms, aligners, and sorting units, such as motor control, photoelectric sensing, limit switch feedback, etc.
Process parameter monitoring
Support input collection and alarm judgment of key process parameters such as temperature, pressure, and gas flow rate, ensuring the accuracy and safety of process execution.
Modular control system interface
Used for boundary signal processing between modular systems, such as data synchronization and logical judgment between different rack controllers.
Remote diagnosis and maintenance interface
By using this module to collect device operating status and error codes, it supports the upper computer diagnostic system to achieve remote alarm, fault analysis, and maintenance reminder functions.
2.产 品 展 示
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