TEL Tokyo Electron BX81-070012-19印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品型号： TEL Tokyo Electron BX81-070012-19
产品类型： 印刷电路板（PCB，Printed Circuit Board）
主要用途： 半导体设备内部信号处理与控制连接模块
一、产品功能简述：
BX81-070012-19 是 Tokyo Electron（TEL）专为其高端半导体设备定制设计的一款印刷电路板。该 PCB 主要用于内部子系统之间的电气连接、信号传输和控制功能实现，具备高可靠性、高密度布线及电磁兼容性能，适应洁净室复杂环境。
二、主要应用领域：
半导体制造设备内部控制系统
应用于 TEL 的多种晶圆制造设备，如蚀刻设备（Etcher）、化学气相沉积（CVD）、物理气相沉积（PVD）、清洗装置（Wet Bench）等。
信号分配与电源分配模块
担任子系统之间的通信中介，实现控制信号、传感器输入、执行元件控制信号、电源等的集中接入与分发。
设备模块化互联
安装于机架或背板系统中，作为各模块之间的数据与控制信号交换平台，支持模块热插拔与维护。
传感器与执行器连接平台
连接多个现场设备（如压力传感器、温控器、阀门、驱动器），实现中央控制系统的指令分发与数据采集。
工艺参数监测系统
作为信号采集板参与温度、流量、压力等工艺参数的采集与传输，保障生产过程控制的精度与稳定性。
电子控制与安全监测电路
具备一定的保护电路（如短路保护、过载检测等），提升设备运行安全性和故障自检能力。
英文资料：
Product model: TEL Tokyo Electron BX81-070012-19
Product type: Printed Circuit Board (PCB)
Main purpose: Internal signal processing and control connection module for semiconductor equipment
1、 Product Function Description:
BX81-070012-19 is a printed circuit board specially designed by Tokyo Electron (TEL) for its high-end semiconductor equipment. This PCB is mainly used for electrical connections, signal transmission, and control functions between internal subsystems. It has high reliability, high-density wiring, and electromagnetic compatibility performance, and is suitable for complex cleanroom environments.
2、 Main application areas:
Internal Control System of Semiconductor Manufacturing Equipment
Various wafer manufacturing equipment applied to TEL, such as etching equipment (Etcher), chemical vapor deposition (CVD), physical vapor deposition (PVD), cleaning equipment (Wet Bench), etc.
Signal distribution and power distribution module
Serve as a communication intermediary between subsystems, achieving centralized access and distribution of control signals, sensor inputs, actuator control signals, power supplies, etc.
Modular interconnection of devices
Installed in rack or backplane systems, it serves as a data and control signal exchange platform between modules, supporting module hot plugging and maintenance.
Sensor and actuator connection platform
Connect multiple on-site devices (such as pressure sensors, temperature controllers, valves, drivers) to achieve command distribution and data collection for the central control system.
Process parameter monitoring system
As a signal acquisition board, it participates in the collection and transmission of process parameters such as temperature, flow rate, and pressure, ensuring the accuracy and stability of production process control.
Electronic Control and Safety Monitoring Circuit
Equipped with certain protective circuits (such as short-circuit protection, overload detection, etc.), it enhances the safety of equipment operation and fault self checking capability.
2.产 品 展 示
3.其他产品
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