TEL Tokyo Electron 3884-200219-11分析板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：分析板
产品型号：3884-200219-11
制造商：Tokyo Electron Ltd.（TEL）
部件类型：信号分析模块 / 处理板卡 / 功能子板
一、产品概述：
3884-200219-11 分析板 是用于 Tokyo Electron（TEL）半导体设备中的专用功能模块，其主要作用是对来自传感器、探头或工艺系统的模拟信号或数字信号进行采集、分析与初步处理，并将结果反馈至上位控制系统或用于本地控制判断。
该板通常安装在控制机柜或信号处理单元中，是实现设备实时监控与过程控制精度的关键环节之一。
二、核心功能：
| 功能模块 | 描述 |
|---|---|
| 信号采集 | 接收多路输入信号，支持模拟量（如电压/电流）或数字量 |
| 数据处理 | 执行滤波、放大、转换、比较等硬件级或嵌入式处理功能 |
| 工艺判断 | 用于分析特定信号（如温度曲线、压力变化、位置反馈）是否在允许范围 |
| 报警触发 | 当监测数据异常时，可驱动报警输出或停止相应工艺动作 |
| 通讯反馈 | 处理后的数据通过接口传输至主控系统或HMI面板显示 |
三、可能技术参数（参考TEL分析板通用设计推测）：
| 项目 | 参数范围（典型） |
|---|---|
| 输入信号类型 | 模拟信号（0–10V、4–20mA）、数字信号、热电偶等 |
| 信号通道数 | 4–16通道（具体依型号） |
| 分辨率 | 12–16位ADC（模拟信号） |
| 数据更新率 | 支持高速采样（如1–10 kHz） |
| 通信接口 | 通过TEL内部总线或RS232/RS485/EtherCAT传输数据 |
| 电源输入 | 常见为5V或12V DC |
| 板卡结构 | 插卡式或带边缘连接器，适用于TEL控制机架 |
英文资料：
Product Name: Analysis Board
Product model: 3884-200219-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Component Type: Signal Analysis Module/Processing Board/Function Board
1、 Product Overview:
The 3884-200219-11 analysis board is a specialized functional module used in Tokyo Electron (TEL) semiconductor equipment. Its main function is to collect, analyze, and preliminarily process analog or digital signals from sensors, probes, or process systems, and feedback the results to the upper control system or for local control judgment.
This board is usually installed in control cabinets or signal processing units, and is one of the key links to achieve real-time monitoring of equipment and process control accuracy.
2、 Core functions:
Function module description
Signal acquisition and reception of multiple input signals, supporting analog quantities (such as voltage/current) or digital quantities
Data processing involves hardware level or embedded processing functions such as filtering, amplification, conversion, and comparison
Process judgment is used to analyze whether specific signals (such as temperature curves, pressure changes, position feedback) are within the allowable range
When the monitoring data is abnormal, the alarm trigger can drive the alarm output or stop the corresponding process action
The data processed through communication feedback is transmitted to the main control system or HMI panel for display through the interface
3、 Possible technical parameters (reference TEL analysis board general design speculation):
Project parameter range (typical)
Input signal types include analog signals (0-10V, 4-20mA), digital signals, thermocouples, etc
Number of signal channels 4-16 channels (depending on model)
Resolution 12-16 bit ADC (analog signal)
Data update rate supports high-speed sampling (such as 1-10 kHz)
The communication interface transmits data through TEL internal bus or RS232/RS485/EtherCAT
The common power input is 5V or 12V DC
Card structure plug-in or with edge connectors, suitable for TEL control racks
2.产 品 展 示
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