TEL Tokyo Electron BX81-070100-12传感器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
产品名称：传感器板（Sensor Board）
产品型号：BX81-070100-12
制造商：Tokyo Electron Ltd.（TEL）
部件类型：信号采集模块 / 传感器接口电路板
一、产品概述：
BX81-070100-12 是 Tokyo Electron（TEL）设备内部使用的一款传感器板卡，其主要功能是采集来自各类传感器的电信号，并进行初步处理、放大、过滤或转换后传输至主控制系统。它是设备实现精密控制与状态感知的重要环节之一。
此类传感器板常用于检测设备的关键参数，如位置、压力、温度、气流、腔体状态等。
二、功能特点：
| 功能类型 | 描述 |
|---|---|
| 信号采集 | 接收并处理外部传感器信号（模拟量或数字量） |
| 信号调理 | 包括滤波、放大、隔离、电平转换等功能 |
| 数据传输 | 将处理后的信号发送至TEL主控系统（如CPU、控制主板） |
| 状态监控 | 实现对工艺运行中各类传感器状态的实时反馈与报警支持 |
三、可能支持的传感器类型（基于TEL通用设计推测）：
| 传感器类型 | 应用说明 |
|---|---|
| 光电传感器 | 晶圆检测、门开关位置判断 |
| 压力传感器 | 腔体真空压力检测 |
| 温度传感器 | 热板、加热区域温控反馈 |
| 位移传感器 | 控制臂或平台位置监测 |
| 流量传感器 | 气体或液体通道流量监测 |
Product Name: Sensor Board
Product model: BX81-070100-12
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: Signal acquisition module/sensor interface circuit board
1、 Product Overview:
BX81-070100-12 is a sensor board used internally in Tokyo Electron (TEL) equipment. Its main function is to collect electrical signals from various sensors, perform preliminary processing, amplification, filtering, or conversion, and transmit them to the main control system. It is one of the important links for precision control and state perception of equipment.
This type of sensor board is commonly used to detect key parameters of equipment, such as position, pressure, temperature, airflow, chamber status, etc.
2、 Functional features:
Function type description
Signal acquisition, reception, and processing of external sensor signals (analog or digital)
Signal conditioning includes functions such as filtering, amplification, isolation, and level conversion
Data transmission sends the processed signal to the TEL main control system (such as CPU, control motherboard)
Real time feedback and alarm support for various sensor statuses during process operation through status monitoring
3、 Possible supported sensor types (based on TEL universal design speculation):
Sensor type application instructions
Optoelectronic sensor wafer detection, door switch position judgment
Pressure sensor chamber vacuum pressure detection
Temperature sensor hot plate, heating area temperature control feedback
Displacement sensor control arm or platform position monitoring
Flow sensor for gas or liquid channel flow monitoring
2.产 品 展 示
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