TEL Tokyo Electron E281-000016-41控制器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
产品型号:E281-000016-41
产品名称:控制器模块(Controller Module)
制造商:Tokyo Electron Ltd.(TEL)
部件类别:控制核心单元 / 嵌入式控制板 / 工艺子系统控制模块
一、产品概述:
E281-000016-41 是一款用于 TEL 半导体设备内部的 控制器模块,其作用是作为某一子系统的“主控单元”,通过接收来自上位系统的指令,完成具体工艺或设备组件的控制任务。
此类模块通常基于嵌入式控制平台或工业计算架构,承担 逻辑运算、设备联动、实时采集、过程反馈 等多重任务,是关键工艺控制流程的核心部件之一。
二、功能特点:
功能类型 | 功能描述 |
---|---|
信号采集 | 接收数字量/模拟量输入信号,如温度、压力、位置等反馈信号 |
输出控制 | 发出开关控制、PWM、模拟电压等控制信号至阀门、马达、泵等执行器 |
工艺逻辑执行 | 内置或加载TEL专用控制逻辑程序,实现精密流程控制 |
通讯管理 | 通过TEL内部总线、以太网、RS485或CAN接口与上位控制系统通信 |
故障检测与保护 | 具备自诊断、异常状态报警输出功能,提高系统稳定性 |
三、技术规格(推测,基于TEL控制模块通用设计):
项目 | 参数或说明 |
---|---|
控制架构 | 嵌入式CPU / FPGA / 专用SoC控制核心 |
输入接口 | 多通道DI(开关量输入)、AI(模拟输入)接口 |
输出接口 | DO输出、模拟控制输出(0–10V、PWM等) |
通讯方式 | 可能支持 RS-232C、EtherCAT、CANopen、TEL专用协议 |
稳定性设计 | EMC抗干扰、电源隔离、防静电设计 |
安装方式 | 插拔式控制背板或独立安装式模块(带安装孔位或滑轨) |
英文资料:
Product model: E281-000016-41
Product Name: Controller Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Component Category: Control Core Unit/Embedded Control Board/Process Subsystem Control Module
1、 Product Overview:
E281-000016-41 is a controller module used inside TEL semiconductor equipment. Its function is to act as the "main control unit" of a subsystem, completing specific process or equipment component control tasks by receiving instructions from the upper system.
Such modules are typically based on embedded control platforms or industrial computing architectures, undertaking multiple tasks such as logical operations, device linkage, real-time data collection, and process feedback. They are one of the core components of critical process control flows.
2、 Functional features:
Function Type Function Description
Signal acquisition receives digital/analog input signals, such as temperature, pressure, position, and other feedback signals
Output control sends out switch control PWM、 Simulate voltage and other control signals to actuators such as valves, motors, pumps, etc
Process logic execution with built-in or loaded TEL dedicated control logic program to achieve precise process control
Communication management communicates with the upper control system through TEL internal bus, Ethernet, RS485 or CAN interface
Fault detection and protection have self diagnosis and abnormal state alarm output functions, improving system stability
3、 Technical specifications (presumably based on universal design of TEL control module):
Project parameters or description
Control Architecture Embedded CPU/FPGA/Dedicated SoC Control Core
Input interface: Multi channel DI (switch input), AI (analog input) interface
Output interface DO output, analog control output (0-10V, PWM, etc.)
Communication methods may support RS-232C, EtherCAT, CANopen, TEL specific protocols
Stability design EMC anti-interference, power isolation, anti-static design
Installation method: Plug in control backplane or independent installation module (with mounting holes or rails)
2.产 品 展 示
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