TEL Tokyo Electron 3Z81-000011-V1接口板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3Z81-000011-V1 接口板（Interface Board） 是一款应用于TEL半导体制造设备中的专用信号转换与连接模块，用于在主控系统与子模块之间实现数据通信、电气接口桥接与信号隔离保护，在设备正常运行中起到关键的中枢连接作用。
一、基本信息
产品名称：接口板（Interface Board）
产品型号：3Z81-000011-V1
制造商：Tokyo Electron Ltd.（TEL）
板卡功能：信号连接、中继、协议转换、电气隔离等
部署位置：主控柜内部、设备背板插槽、I/O控制机架
二、主要功能
多信号类型连接
提供多种信号输入/输出接口，连接传感器、驱动器、执行器等。
支持TTL、差分信号、模拟电压、继电器接点等多类型信号接入。
主控与子系统之间的桥梁
实现主控板（如CPU卡、控制主板）与外部信号设备之间的数据收发。
支持串行通信、并行信号、数字量/模拟量转接等功能。
电气隔离与抗干扰
接口带有光耦、电隔离或滤波保护，确保信号完整性和抗EMI能力。
降低信号冲突与误触发风险。
系统兼容性与扩展性
作为模块化板件设计，便于系统升级、替换或功能扩展。
三、典型应用场景
| 应用设备类型 | 接口板作用示例 |
|---|---|
| Etcher系统 | 连接真空阀门控制器、压力传感器、门锁信号反馈 |
| CVD/ALD系统 | 接入温度传感器、加热控制单元、报警模块等 |
| Track设备 | 对接电机驱动信号、光电传感器、限位开关 |
| Transfer搬运模块 | 转接机械臂状态反馈信号、传输位置检测信号等 |
英文资料：
The TEL Tokyo Electron 3Z81-000011-V1 Interface Board is a specialized signal conversion and connection module used in TEL semiconductor manufacturing equipment. It is used to achieve data communication, electrical interface bridging, and signal isolation protection between the main control system and sub modules, and plays a key central connection role in the normal operation of the equipment.
1、 Basic Information
Product Name: Interface Board
Product model: 3Z81-000011-V1
Manufacturer: Tokyo Electron Ltd. (TEL)
Board functions: signal connection, relay, protocol conversion, electrical isolation, etc
Deployment location: inside the main control cabinet, equipment backplane slot, I/O control rack
2、 Main functions
Multi signal type connection
Provide multiple signal input/output interfaces to connect sensors, drivers, actuators, etc.
Supports multiple types of signal access, including TTL, differential signal, analog voltage, and relay contacts.
The bridge between the main control and subsystems
Implement data transmission and reception between the main control board (such as CPU card, control motherboard) and external signal devices.
Support functions such as serial communication, parallel signal, digital/analog conversion, etc.
Electrical isolation and anti-interference
The interface is equipped with optocouplers, electrical isolation or filtering protection to ensure signal integrity and EMI resistance.
Reduce the risk of signal conflicts and false triggering.
System compatibility and scalability
As a modular board design, it facilitates system upgrades, replacements, or functional extensions.
3、 Typical application scenarios
Example of Application Device Type Interface Board Function
The Etcher system is connected to the vacuum valve controller, pressure sensor, and door lock signal feedback
The CVD/ALD system is connected to temperature sensors, heating control units, alarm modules, etc
Track equipment interfaces with motor drive signals, photoelectric sensors, and limit switches
Transfer module transfers feedback signals of robotic arm status, transmission position detection signals, etc
2.产 品 展 示
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