TEL Tokyo Electron 381-639472-2数字量输入卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-639472-2 数字量输入卡件（Digital Input Card） 是TEL半导体设备中用于采集数字（开关量）输入信号的关键模块，负责接收设备各部位的开关信号，实现状态监测和工艺控制。
一、基本信息
产品名称：数字量输入卡件（Digital Input Card）
产品型号：381-639472-2
制造商：Tokyo Electron Ltd.（TEL）
功能类别：数字输入模块（DI Module）
安装位置：设备控制柜、I/O模块架、控制系统接口
二、主要功能
数字信号采集
接收来自传感器、按钮、限位开关、继电器触点等的开关量信号（0/24V DC）。
实时反馈设备状态（如门开关状态、机械位置、报警信号等）。
状态检测与传输
将采集的数字输入信号传送至主控制系统（PLC、嵌入式控制器等），供逻辑判断和动作触发使用。
联锁与安全控制
支持安全联锁逻辑，防止设备在异常状态下运行。
抗干扰设计
配备光耦隔离，提升输入信号的抗干扰能力和系统稳定性。
三、典型应用领域
| 应用设备类型 | 信号类型及作用 |
|---|---|
| 刻蚀设备（Etcher） | 门锁状态、真空状态反馈、气阀位置 |
| CVD/ALD系统 | 加热器状态、流量控制开关反馈 |
| 涂胶显影设备（Track） | 晶圆在位检测、平台限位开关 |
| 搬运系统（Transfer） | 机械臂位置、夹具状态检测 |
英文资料：
The TEL Tokyo Electron 381-639472-2 Digital Input Card is a key module used in TEL semiconductor equipment to collect digital (switch) input signals. It is responsible for receiving switch signals from various parts of the equipment, achieving status monitoring and process control.
1、 Basic Information
Product Name: Digital Input Card
Product model: 381-639472-2
Manufacturer: Tokyo Electron Ltd. (TEL)
Functional category: Digital Input Module (DI Module)
Installation location: Equipment control cabinet, I/O module rack, control system interface
2、 Main functions
Digital signal acquisition
Receive switch signals (0/24V DC) from sensors, buttons, limit switches, relay contacts, etc.
Real time feedback on device status (such as door switch status, mechanical position, alarm signals, etc.).
Status detection and transmission
Transmit the collected digital input signals to the main control system (PLC, embedded controller, etc.) for logic judgment and action triggering.
Interlocking and safety control
Support safety interlock logic to prevent equipment from operating in abnormal states.
anti-interference design
Equipped with optocoupler isolation to enhance the anti-interference ability and system stability of input signals.
3、 Typical application areas
Application device type, signal type, and function
Etcher equipment door lock status, vacuum status feedback, air valve position
CVD/ALD system heater status and flow control switch feedback
Coating and developing equipment (Track) wafer in-situ detection, platform limit switch
Transfer system: Detection of robotic arm position and fixture status
2.产 品 展 示
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