TEL Tokyo Electron 3884-200170-16印刷电路板 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 3884-200170-16 印刷电路板(Printed Circuit Board, PCB) 是一款用于TEL半导体制造设备中的定制化电子模块,主要承担设备某个子系统的信号处理、控制逻辑、通信接口或电源分配等任务。此类PCB通常是设备控制系统的专属组件,设计紧密匹配TEL整机系统架构,具有高度集成与工业可靠性。
一、基本信息
产品名称:印刷电路板(控制功能板卡)
产品型号:3884-200170-16
制造商:Tokyo Electron Ltd.(TEL)
模块分类:嵌入式功能控制板 / I/O接口板 / 逻辑处理电路板(具体视设备而定)
应用系统:可能隶属于 Etch、CVD、Track 或 Transfer 系统中的子模块
二、功能描述(视实际设备配置)
由于 TEL 的 PCB 模块常为专机专用,3884-200170-16 这类印刷电路板可能实现以下一项或多项功能:
信号中继与接口处理
在上位控制器(如主控CPU)与底层传感器、执行器之间提供逻辑中转
进行信号电平转换(TTL ↔ RS232/485 等)
工艺参数调节与控制逻辑执行
参与控制加热、真空、电源、阀门、马达等模块的工作逻辑
可能内置MCU、FPGA等可编程逻辑器件
设备状态监测与通信
实现与其他控制板卡间的总线通信(CAN、TEL专用总线、I²C、SPI等)
提供故障检测、状态灯控制、电压监测等附属功能
电源分配或保护电路功能
向子模块分配稳定电压
提供过压、过流、浪涌等防护
英文资料:
TEL Tokyo Electron 3884-2000170-16 Printed Circuit Board (PCB) is a customized electronic module used in TEL semiconductor manufacturing equipment, mainly responsible for signal processing, control logic, communication interface, or power distribution tasks of a certain subsystem of the equipment. This type of PCB is usually an exclusive component of the equipment control system, designed to closely match the TEL system architecture, and has high integration and industrial reliability.
1、 Basic Information
Product Name: Printed Circuit Board (Control Function Board)
Product model: 3884-200170-16
Manufacturer: Tokyo Electron Ltd. (TEL)
Module classification: Embedded Function Control Board/I/O Interface Board/Logic Processing Circuit Board (depending on the device)
Application system: may belong to submodules in Etch, CVD, Track, or Transfer systems
2、 Function description (depending on actual device configuration)
Due to the fact that TEL's PCB modules are often dedicated to specialized machines, printed circuit boards such as 3884-200170-16 may achieve one or more of the following functions:
Signal Relay and Interface Processing
Provide logical relay between the upper controller (such as the main control CPU) and the underlying sensors and actuators
Perform signal level conversion (TTL) ↔ RS232/485, etc.)
Process parameter adjustment and control logic execution
Participate in controlling the working logic of modules such as heating, vacuum, power, valves, motors, etc
Possible built-in programmable logic devices such as MCU and FPGA
Equipment status monitoring and communication
Implement bus communication with other control boards (CAN, TEL dedicated bus, I ² C, SPI, etc.)
Provide auxiliary functions such as fault detection, status light control, voltage monitoring, etc
Power distribution or protection circuit function
Allocate stable voltage to submodules
Provide protection against overvoltage, overcurrent, surge, etc
2.产 品 展 示
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