TEL Tokyo Electron 1181-000544-13数字量控制板卡 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1181-000544-13 数字量控制板卡（Digital I/O Control Board） 是一款用于半导体制造设备中的高可靠性控制模块，主要用于采集和输出数字信号（开关量），实现设备内部各类动作控制、状态检测、信号中转和安全联锁等逻辑功能。
一、基本信息
产品名称：数字量控制板卡
产品型号：1181-000544-13
制造商：Tokyo Electron Ltd.（TEL）
功能类别：数字输入/输出控制（DI/DO 控制）
适用系统：TEL Etcher、Coater/Developer、ALD/CVD、搬运系统等多类设备
二、核心功能
数字输入采集（DI）
门禁开关状态
压力传感器触发
真空泵到位信号
机械限位状态等
接收设备各部件的状态反馈信号，如：
数字输出控制（DO）
打开/关闭气阀
启动风扇、加热器或继电器
控制报警灯、蜂鸣器、电磁锁等动作器件
向执行机构发出控制信号，如：
联锁与互锁控制
用于系统间安全联动，如“门未关闭→禁止真空启动”等场景的逻辑判断。
高速逻辑响应
与主控制系统（如PLC或TEL专用控制器）通信，实现毫秒级响应的工艺节拍控制。
英文资料：
TEL Tokyo Electron 1181-000544-13 Digital I/O Control Board is a high reliability control module used in semiconductor manufacturing equipment. It is mainly used to collect and output digital signals (switch values), realize various internal action control, status detection, signal relay, and safety interlock logic functions of the equipment.
1、 Basic Information
Product Name: Digital Control Board
Product model: 1181-000544-13
Manufacturer: Tokyo Electron Ltd. (TEL)
Function category: Digital input/output control (DI/DO control)
Applicable systems: TEL Etcher, Coater/Developer, ALD/CVD, handling systems and other types of equipment
2、 Core functions
Digital Input Acquisition (DI)
Receive status feedback signals from various components of the receiving device, such as:
Access control switch status
Pressure sensor triggered
Vacuum pump in place signal
Mechanical limit status, etc
Digital Output Control (DO)
Send control signals to the executing agency, such as:
Open/close the air valve
Start the fan, heater, or relay
Control the action devices such as alarm lights, buzzers, electromagnetic locks, etc
Interlocking and Interlocking Control
Used for inter system security linkage, such as logical judgment in scenarios such as "door not closed → prohibit vacuum start".
High speed logical response
Communicate with the main control system (such as PLC or TEL dedicated controller) to achieve millisecond level response process beat control.
2.产 品 展 示
3.其他产品
IS400JPDHG1ABB IS410JPDHG1A轴速度反馈传感器
4.其他英文产品
Mitsubishi MELFA CR1-571 Large Contactor
ASEA E-31709 Robot Circuit Board
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| PMB33F-00214-03 | 70BK02B-E | M21NRXB-LDN-NS-00 |
| PMB33F-00214-02 | 70 WB 01a | P21NRXD-LNN-NS-00 |
| PMB33F-00214-01 | DT 371a | P22NSXD-LNN-NS-02 |
| PMB33F-00214-00 | 70PR 03d-E | P22NRXD-LNF-NS-00 |
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