TEL Tokyo Electron SR5039-000614-11电源模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron SR5039-000614-11 电源模块 是一款应用于TEL半导体设备中的专用稳压电源单元，主要用于为设备的关键控制系统、驱动电路和信号处理单元提供安全、稳定的直流电源输出。它是维持TEL设备各电子模块正常运行的电力基础保障部件。
一、基本信息
产品名称：电源模块 / Power Supply Unit
产品型号：SR5039-000614-11
制造商：Tokyo Electron Ltd.（TEL）
产品类型：隔离型/稳压型 DC 电源模块
典型部署位置：主控电柜、电源分配架、子系统电源槽位
二、主要功能
电压转换与稳压输出
将AC或DC输入转换为TEL系统所需的多路稳定DC输出（如+5V、+12V、+24V等）。
精准供电支持逻辑板卡、I/O模块、驱动电路、传感器等子系统。
过载与异常保护
具备过压、过流、短路、过温等自动防护能力，确保设备安全运行。
输出电路具备电隔离功能，有效防止干扰耦合和系统损坏。
支持模块化更换与维护
采用可插拔结构或螺装结构，便于现场快速更换和系统维护。
三、典型应用设备（示意）
| 应用设备类型 | 功能作用 |
|---|---|
| Etcher 系统 | 为RF控制板、真空阀控制模块、传感器板供电 |
| CVD/ALD 系统 | 驱动加热板、化学源阀、流量控制单元等 |
| Track 系统 | 提供光源控制板、马达控制、温度控制回路电源 |
| 搬运机械单元 | 机械臂控制器、吸附检测、驱动电路供电支持 |
英文资料：
The TEL Tokyo Electron SR5039-000614-11 power module is a specialized regulated power supply unit used in TEL semiconductor equipment, mainly used to provide safe and stable DC power output for critical control systems, drive circuits, and signal processing units of the equipment. It is the power basic guarantee component that maintains the normal operation of various electronic modules in TEL equipment.
1、 Basic Information
Product Name: Power Supply Unit
Product model: SR5039-000614-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Product Type: Isolated/Stabilized DC Power Module
Typical deployment locations: main control cabinet, power distribution rack, subsystem power slot
2、 Main functions
Voltage Conversion and Stable Voltage Output
Convert AC or DC input to multiple stable DC outputs required for TEL system (such as+5V,+12V,+24V, etc.).
Accurate power supply supports subsystems such as logic boards, I/O modules, driver circuits, sensors, etc.
Overload and abnormal protection
Equipped with automatic protection capabilities such as overvoltage, overcurrent, short circuit, and overheating, ensuring the safe operation of the equipment.
The output circuit has electrical isolation function, effectively preventing interference coupling and system damage.
Support modular replacement and maintenance
Adopting a pluggable or screw on structure, it facilitates quick on-site replacement and system maintenance.
3、 Typical application devices (schematic)
Function and role of application device type
The Etcher system supplies power to the RF control board, vacuum valve control module, and sensor board
CVD/ALD system drives heating plates, chemical source valves, flow control units, etc
Track system provides power supply for light source control board, motor control, temperature control circuit
Mechanical arm controller, adsorption detection, and power supply support for the driving circuit of the handling machinery unit
2.产 品 展 示
3.其他产品
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