TEL Tokyo Electron 2109-321472-11电源模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 2109-321472-11 电源模块（Power Supply Module） 是一款专为TEL半导体设备设计的稳压供电装置，负责为设备中的各类电子控制系统、传感器模块和执行器提供稳定、隔离、安全的电力支持。它是维持整个系统正常运行的基础部件之一。
一、基本信息
产品名称：电源模块 / Power Supply Unit
产品型号：2109-321472-11
制造商：Tokyo Electron Ltd.（TEL）
功能类型：稳压电源模块 / DC电源转换器
安装位置：设备电控机柜、电源分配架、子系统供电单元中
二、主要功能
电压转换与稳压输出
将外部输入电压（如 AC 100–240V 或 DC 24V）转换为设备所需的稳定输出电压（如 +5V, +12V, +24V DC）。
适配多个控制模块、板卡、传感器的用电需求。
隔离保护功能
提供输入/输出之间的电气隔离，避免干扰传播和故障扩大。
具备短路、过压、过流、过热等自动保护机制。
模块化电源管理
可通过系统控制软件或硬件开关进行远程/本地上电控制。
支持设备分区供电，利于维护与故障隔离。
三、典型应用领域
| 设备类型 | 电源用途 |
|---|---|
| Etcher（干法刻蚀设备） | 为真空控制模块、阀门驱动、气体模块控制板等提供DC电源 |
| CVD/ALD沉积设备 | 提供加热控制板、电磁阀、传感器供电 |
| 光刻涂胶设备（Track） | 为马达控制板、显影单元、加热单元供电 |
| 搬运模块（Transfer System） | 驱动机器人、夹爪传感器、I/O控制系统等电源支持 |
英文资料：
The TEL Tokyo Electron 2109-321472-11 Power Supply Module is a regulated power supply device designed specifically for TEL semiconductor equipment, responsible for providing stable, isolated, and safe power support for various electronic control systems, sensor modules, and actuators in the equipment. It is one of the fundamental components that maintain the normal operation of the entire system.
1、 Basic Information
Product Name: Power Supply Unit
Product model: 2109-321472-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Function type: Stabilized voltage power module/DC power converter
Installation location: in the equipment control cabinet, power distribution rack, and subsystem power supply unit
2、 Main functions
Voltage Conversion and Stable Voltage Output
Convert external input voltage (such as AC 100-240V or DC 24V) into the stable output voltage required by the device (such as+5V,+12V,+24V DC).
Adapt to the power requirements of multiple control modules, boards, and sensors.
Isolation protection function
Provide electrical isolation between input/output to avoid interference propagation and fault propagation.
Equipped with automatic protection mechanisms such as short circuit, overvoltage, overcurrent, and overheating.
Modular power management
Remote/local power on control can be achieved through system control software or hardware switches.
Support partitioned power supply for devices, facilitating maintenance and fault isolation.
3、 Typical application areas
Equipment type, power supply purpose
Etcher (dry etching equipment) provides DC power for vacuum control modules, valve drivers, gas module control boards, etc
CVD/ALD deposition equipment provides heating control board, solenoid valve, and sensor power supply
The photoresist coating equipment (Track) supplies power to the motor control board, developing unit, and heating unit
Transfer System drives robots, gripper sensors, I/O control systems, and provides power support
2.产 品 展 示
3.其他产品
4.其他英文产品
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