TEL Tokyo Electron 381-648286-12数字量输入卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-648286-12 数字量输入卡件（Digital Input Card） 是一款专用于TEL半导体制造设备中的数字信号采集模块，用于接收和处理来自设备各处的开关量（ON/OFF）信号，实现设备运行状态的检测、过程联锁、报警触发等控制任务。
一、基本信息
产品名称：数字量输入卡件（DI卡）
产品型号：381-648286-12
制造商：Tokyo Electron Ltd.（TEL）
板卡类型：数字输入（DI）模块
典型位置：设备控制机柜、输入/输出接口框架、电气分区模块内
二、主要功能
开关信号采集（Digital Input）
接收来自按钮、行程开关、接近传感器、限位器、安全门锁等的状态信号（如 0/24V DC）。
判断设备是否达到指定工艺状态或安全条件。
状态反馈处理
将输入信号反馈至主控系统（如PLC、嵌入式控制器），用于驱动逻辑判断和自动流程。
支持多通道实时扫描，确保响应速度。
联锁与报警触发
输入信号变化可触发设备联锁逻辑或报警流程，保障运行安全。
系统互锁机制
与数字输出卡件、主控板协同，实现对设备动作的许可/禁止控制逻辑。
三、典型应用领域
| 应用系统 | 采集信号类型 |
|---|---|
| 刻蚀设备（Etcher） | 反应腔门状态、真空开关、气体切换完成反馈等 |
| CVD/ALD设备 | 加热器状态反馈、阀门到位信号、化学源保护触发器 |
| 光刻/涂胶显影（Track） | 晶圆在位检测、旋转平台门锁、液位报警等 |
| 搬运系统 | 机械臂限位、夹持器状态、托盘存在检测等 |
英文资料：
TEL Tokyo Electron 381-648286-12 Digital Input Card is a digital signal acquisition module specifically designed for TEL semiconductor manufacturing equipment. It is used to receive and process ON/OFF signals from various parts of the equipment, and to achieve control tasks such as detecting equipment operating status, process interlocking, and alarm triggering.
1、 Basic Information
Product Name: Digital Input Card (DI Card)
Product model: 381-648286-12
Manufacturer: Tokyo Electron Ltd. (TEL)
Board type: Digital Input (DI) module
Typical locations: within equipment control cabinets, input/output interface frameworks, and electrical partition modules
2、 Main functions
Switch signal acquisition (Digital Input)
Receive status signals (such as 0/24V DC) from buttons, travel switches, proximity sensors, limiters, safety door locks, etc.
Determine whether the equipment has reached the specified process state or safety conditions.
Status feedback processing
Feedback the input signal to the main control system (such as PLC, embedded controller) for driving logic judgment and automatic processes.
Support multi-channel real-time scanning to ensure response speed.
Interlocking and alarm triggering
Changes in input signals can trigger equipment interlocking logic or alarm processes, ensuring safe operation.
System interlocking mechanism
Collaborate with digital output cards and the main control board to implement permission/prohibition control logic for device actions.
3、 Typical application areas
Application system collects signal types
Etcher reaction chamber door status, vacuum switch, gas switching completion feedback, etc
CVD/ALD equipment heater status feedback, valve in place signal, chemical source protection trigger
Photolithography/coating development (Track) wafer in-situ detection, rotating platform door lock, liquid level alarm, etc
Mechanical arm limit, gripper status, pallet presence detection, etc. in the handling system
2.产 品 展 示
3.其他产品
4.其他英文产品
AMAT 0190-11415 Digital Input Module
| PMB33F-20101-00 | Gespac GESMFI-1 9119 | TC520 3BSE001449R1 |
| PMB33F-20100-03 | HONEYWELL CC-TDOB01 | 086348-001 |
| PMB33F-20100-02 | DSTA180 57120001-ET | DSQC406 |
| PMB33F-20100-01 | DSQC663 3HAC029818-001/14 | UA C326 AE01 HIEE401481R0001 |
| PMB33F-20100-00 | DSPC172H 57310001-MP | 6DD2920-0AJ0 |
| PMB33F-10216-03 | PIB-701 700007672 | 6DD2920-0AQ0 |
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