TEL Tokyo Electron 3D81-000038-V2印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-000038-V2 印刷电路板（Printed Circuit Board，PCB） 是一款用于TEL半导体制造设备中的专用电子控制模块，通常用于实现信号中继、系统逻辑控制、接口处理或功能电路集成。该电路板作为设备系统中的核心组件之一，承担着特定子系统的信号连接与逻辑执行功能。
一、基本信息
产品名称：印刷电路板 / 控制电路板
产品型号：3D81-000038-V2
制造商：Tokyo Electron Ltd.（TEL）
功能类型：控制逻辑电路板 / 接口转换板 / 中继处理板（具体取决于设备型号）
典型安装位置：设备主控机架、电控箱、IO接口系统中
二、主要功能（视具体配置而定）
信号中继与分配
连接主控系统与子系统（如传感器、执行器、阀控模块等），实现信号中转和逻辑判断。
接口协议处理
执行信号电平匹配、通信协议转换（如TTL ↔ RS-232/485）等功能。
系统逻辑控制
集成专用电路（如微控制器、逻辑门阵列、放大器等），用于执行特定工艺步骤的控制逻辑。
保护与隔离功能
实现电源、电信号的隔离与保护，如ESD防护、电源滤波等。
三、典型应用设备
该PCB模块常应用于以下TEL设备中，发挥中控辅助作用：
| 设备类型 | 应用说明 |
|---|---|
| Etcher（刻蚀设备） | 处理射频控制信号、阀门控制、等离子源中继逻辑 |
| CVD/ALD系统 | 管理温控反馈信号、化学气体切换控制 |
| Track设备（涂胶显影） | 控制显影单元、烘烤平台、液体阀组件 |
| Transfer Module（搬运系统） | 处理机械手、吸盘、托盘状态信号等 |
英文资料：
TEL Tokyo Electron 3D81-000038-V2 Printed Circuit Board (PCB) is a specialized electronic control module used in TEL semiconductor manufacturing equipment, typically for signal relay, system logic control, interface processing, or functional circuit integration. As one of the core components in the device system, this circuit board is responsible for signal connection and logic execution functions of specific subsystems.
1、 Basic Information
Product Name: Printed Circuit Board/Control Circuit Board
Product model: 3D81-000038-V2
Manufacturer: Tokyo Electron Ltd. (TEL)
Function type: Control logic circuit board/interface conversion board/relay processing board (depending on the device model)
Typical installation locations: equipment main control rack, electrical control box, IO interface system
2、 Main functions (depending on specific configuration)
Signal Relay and Distribution
Connect the main control system with subsystems (such as sensors, actuators, valve control modules, etc.) to achieve signal relay and logical judgment.
Interface protocol processing
Perform signal level matching and communication protocol conversion (such as TTL) ↔ Functions such as RS-232/485.
System logic control
Integrated specialized circuits (such as microcontrollers, logic gate arrays, amplifiers, etc.) are used to execute control logic for specific process steps.
Protection and isolation function
Implement isolation and protection of power and electrical signals, such as ESD protection, power filtering, etc.
3、 Typical application devices
This PCB module is commonly used in the following TEL devices to play a central control auxiliary role:
Equipment type application instructions
Etcher (etching equipment) processes RF control signals, valve control, and plasma source relay logic
CVD/ALD system management temperature control feedback signal, chemical gas switching control
Track equipment (adhesive development) controls the development unit, baking platform, and liquid valve components
Transfer Module (handling system) processes status signals of robotic arms, suction cups, trays, etc
2.产 品 展 示
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