TEL Tokyo Electron 3D81-00004-15传感器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 3D81-00004-15 传感器模块（Sensor Module） 是Tokyo Electron半导体设备中的关键电子模块，用于采集和处理设备中的各类传感器信号，支持设备工艺参数的精准监控与反馈。
一、基本信息
产品名称：传感器模块
型号：3D81-00004-15
制造商：Tokyo Electron Ltd. (TEL)
模块类型：传感器信号采集与处理模块
应用领域：广泛应用于半导体制造设备如刻蚀、沉积、清洗及搬运系统
二、主要功能
多类型传感器信号采集
接收温度、压力、流量、真空度等模拟信号；
支持数字传感器信号输入。
信号调理与转换
对传感器信号进行滤波、放大、数字转换等处理，确保数据准确稳定。
数据传输与反馈
将处理后的信号传输至主控系统，用于工艺控制和设备状态监测。
异常检测与报警联动
支持超限报警功能，保证设备安全运行。
三、典型应用领域
刻蚀设备：监测腔体内气体压力、温度及等离子体参数。
CVD/ALD沉积设备：监控腔体温度、气流及化学气体浓度。
晶圆清洗系统：检测化学液浓度、液位及泵状态。
搬运机械：传感器状态监控，保障机械手动作精度与安全。
英文资料：
The TEL Tokyo Electron 3D81-00004-15 Sensor Module is a key electronic module in Tokyo Electron semiconductor equipment, used to collect and process various sensor signals in the equipment, supporting precise monitoring and feedback of equipment process parameters.
1、 Basic Information
Product Name: Sensor Module
Model: 3D81-00004-15
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Sensor signal acquisition and processing module
Application areas: Widely used in semiconductor manufacturing equipment such as etching, deposition, cleaning, and handling systems
2、 Main functions
Multi type sensor signal acquisition
Receive analog signals such as temperature, pressure, flow rate, vacuum degree, etc;
Support digital sensor signal input.
Signal conditioning and conversion
Filter, amplify, and convert sensor signals to ensure accurate and stable data.
Data transmission and feedback
Transmit the processed signal to the main control system for process control and equipment status monitoring.
Abnormal detection and alarm linkage
Support over limit alarm function to ensure safe operation of equipment.
3、 Typical application areas
Etching equipment: Monitor gas pressure, temperature, and plasma parameters inside the chamber.
CVD/ALD deposition equipment: monitors chamber temperature, gas flow, and chemical gas concentration.
Wafer cleaning system: detects chemical concentration, liquid level, and pump status.
Handling machinery: Sensor status monitoring to ensure the accuracy and safety of robotic arm movements.
2.产 品 展 示
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