TEL Tokyo Electron EC08-000007-11控制脉冲卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron EC08-000007-11 控制脉冲卡件（Control Pulse Card） 是TEL半导体制造设备中用于精确脉冲信号产生和控制的电子模块，广泛应用于设备的运动控制、步进执行和时序管理等关键领域。
一、基本信息
产品名称：控制脉冲卡件
型号：EC08-000007-11
制造商：Tokyo Electron Ltd.（TEL）
模块类型：脉冲信号生成与控制模块
应用领域：设备运动控制、驱动脉冲生成、自动化时序控制
二、主要功能
脉冲信号输出
产生精准的脉冲序列，用于驱动步进电机、伺服驱动器等执行机构。
支持多种脉冲频率和脉宽调节，以满足不同驱动需求。
同步控制
与主控系统协同，实现多轴同步运动和时序精确控制。
保证设备动作的准确性和重复定位精度。
信号转换与放大
将主控器发出的控制信号转换成适合执行器接收的脉冲电平。
提供隔离和缓冲，防止干扰和信号衰减。
接口兼容
适配TEL设备的标准通信和控制接口，实现快速集成。
三、典型应用领域
晶圆搬运系统（Wafer Handling）
控制机械手臂的步进电机，精准定位晶圆位置。光刻设备中的旋转与定位控制
生成控制涂胶旋转平台或曝光定位机构的脉冲信号。刻蚀与沉积设备运动单元
驱动阀门调节机构、快门控制、样品台运动。
英文资料：
TEL Tokyo Electron EC08-000007-11 Control Pulse Card is an electronic module used in TEL semiconductor manufacturing equipment for precise pulse signal generation and control. It is widely used in key fields such as motion control, step execution, and timing management of equipment.
1、 Basic Information
Product Name: Control Pulse Card
Model: EC08-000007-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Pulse signal generation and control module
Application areas: equipment motion control, drive pulse generation, automated timing control
2、 Main functions
Pulse signal output
Generate precise pulse sequences for driving actuators such as stepper motors and servo drives.
Support multiple pulse frequencies and pulse width adjustments to meet different driving requirements.
synchronization
Collaborate with the main control system to achieve multi axis synchronous motion and precise timing control.
Ensure the accuracy of device actions and repeat positioning precision.
Signal conversion and amplification
Convert the control signal emitted by the main controller into a pulse level suitable for the actuator to receive.
Provide isolation and buffering to prevent interference and signal attenuation.
Interface compatibility
Adapt to the standard communication and control interfaces of TEL devices to achieve rapid integration.
3、 Typical application areas
Wafer Handling System
Control the stepper motor of the robotic arm to accurately position the wafer.
Rotation and positioning control in lithography equipment
Generate pulse signals to control the adhesive rotation platform or exposure positioning mechanism.
Etching and deposition equipment motion unit
Drive valve adjustment mechanism, shutter control, and sample stage movement.
2.产 品 展 示
3.其他产品
ABB UFC760BE142 3BHE004573R0142 控制器模块
4.其他英文产品
ASEA 2668 180-291 slot control
| PXIe-6545 | R45HCNA-TS-LF-NV-00 | S24HNNA-RNNM-00 |
| PXIe-6544 | SC103 | S32HNNA-RNVM-02 |
| PXIe-6363 | R43HEAA-R2-NS-NV-00 | R45GCAA-R2-NS-NV-80 |
| PXIe-6259 | R21HSNA-R1-NS-VS-04 | R32GENP-R2-NS-NV-00 |
| PXIe-5673E | R88SENA-T2-SS-NV-03 | S32GMNA-RNNE-00 |
| PXIe-5665 | R34JENC-R2-NS-VS-00 | R33HENC-R2-NS-NV-00 |
| PXIe-5653 | R33HDNC-R2-NS-NV-00 | R33GENC-TS-NS-NV-00 |
本篇文章出自瑞昌明盛自动化设备有限公司官网，转载请附上此链接:http://www.jiangxidcs
