TEL Tokyo Electron 381-639094-4数字量输入卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 381-639094-4 数字量输入卡件（Digital Input Card） 是一款专用于TEL半导体设备中的电子信号采集模块，负责接收和处理来自外部设备的数字信号，实现工艺过程中的状态监控、设备联锁和逻辑判断等功能。
一、基本信息
产品名称：数字量输入卡件 / 数字输入模块
产品型号：381-639094-4
制造商：Tokyo Electron Ltd.（TEL）
模块类型：数字输入信号采集板（DI模块）
应用范围：Etcher、CVD、清洗、Track 等TEL自动化制程设备
二、主要功能
信号采集
接收来自开关、传感器、继电器、光电检测等设备的开关信号（ON/OFF）。
逻辑判断
将输入信号传送至主控制系统（如PLC或工业PC），用于设备运行逻辑的判断和流程推进。
安全联锁支持
输入信号可作为设备启动、腔体闭锁、真空状态确认等联锁条件之一。
状态反馈监控
通过数字输入监控关键机构（如门控、气阀、机械臂）的实际状态，确保工艺过程安全执行。
三、典型应用领域
该卡件广泛应用于TEL多个核心设备系统中，具体包括：
干法刻蚀设备（Etcher）
接收门控、真空到位信号，参与等离子启动联锁。
CVD / ALD设备
接收反应腔体开闭状态、气体阀门状态等信息。
晶圆清洗设备
检测化学液供给状态、泵启动信号、液位传感器反馈。
光刻胶处理设备（Track System）
接收托盘位置、晶圆载入、加热模块门状态等数字反馈信号。
英文资料：
TEL Tokyo Electron 381-639094-4 Digital Input Card is an electronic signal acquisition module specifically designed for TEL semiconductor equipment. It is responsible for receiving and processing digital signals from external devices, achieving functions such as status monitoring, equipment interlocking, and logic judgment during the process.
1、 Basic Information
Product Name: Digital Input Card/Digital Input Module
Product model: 381-639094-4
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: Digital input signal acquisition board (DI module)
Application scope: TEL automation process equipment such as Etcher, CVD, cleaning, Track, etc
2、 Main functions
signal acquisition
Receive switch signals (ON/OFF) from devices such as switches, sensors, relays, and photodetectors.
logical judgment
Transmit input signals to the main control system (such as PLC or industrial PC) for the judgment of equipment operation logic and process advancement.
Safety interlock support
The input signal can be used as one of the interlocking conditions for device startup, chamber locking, vacuum status confirmation, etc.
Status feedback monitoring
Monitor the actual status of key mechanisms such as door control, air valves, and robotic arms through digital inputs to ensure safe execution of the process.
3、 Typical application areas
This card is widely used in multiple core equipment systems of TEL, including:
Dry etching equipment (Etcher)
Receive gate control and vacuum in place signals, and participate in plasma start interlocking.
CVD/ALD equipment
Receive information on the opening and closing status of the reaction chamber, gas valve status, etc.
Wafer Cleaning Systems
Detect the supply status of chemical solution, pump start signal, and liquid level sensor feedback.
Photoresist processing equipment (Track System)
Receive digital feedback signals such as tray position, wafer loading, and heating module door status.
2.产 品 展 示
3.其他产品
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