TEL Tokyo Electron E249-000003-13屏幕监视器 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron E249-000003-13 屏幕监视器(Monitor Display Unit) 是专用于TEL半导体设备中的工业级显示模块,主要用于人机界面(HMI)操作、系统状态监视、报警显示和工艺数据可视化。它通常作为操作台或设备面板的一部分,为工程师或操作员提供交互与控制平台。
一、基本信息
产品名称:屏幕监视器 / 显示器单元
产品型号:E249-000003-13
制造商:Tokyo Electron Ltd.(TEL)
产品类型:工业显示器(Industrial Monitor)
适用设备:用于TEL的刻蚀机、CVD机、清洗机、Track系统等
二、主要功能
工艺监控显示
实时显示设备工艺参数(温度、压力、流量等);
展示腔体状态、进程进度、设备警报等关键信息。
操作界面支持
用于显示人机界面(HMI),操作员可通过触摸或按钮操作控制设备;
支持菜单切换、日志查询、配方设定等功能。
报警与提示
显示当前系统报警、故障信息、警示代码;
指导用户快速排查并恢复生产。
通信与远程管理接口
支持与TEL主控系统或PLC通信,实时同步数据;
可兼容TEL专用软件界面或嵌入式控制平台。
英文资料:
TEL Tokyo Electron E249-000003-13 Monitor Display Unit is an industrial grade display module specifically designed for TEL semiconductor equipment. It is mainly used for human-machine interface (HMI) operation, system status monitoring, alarm display, and process data visualization. It is usually used as a part of the console or equipment panel, providing an interaction and control platform for engineers or operators.
1、 Basic Information
Product Name: Screen Monitor/Display Unit
Product model: E249-000003-13
Manufacturer: Tokyo Electron Ltd. (TEL)
Product type: Industrial Monitor
Applicable equipment: Etching machines, CVD machines, cleaning machines, Track systems, etc. for TEL
2、 Main functions
Process monitoring display
Real time display of equipment process parameters (temperature, pressure, flow rate, etc.);
Display key information such as cavity status, process progress, equipment alarms, etc.
Operation interface support
Used to display human-machine interface (HMI), operators can control equipment through touch or button operation;
Support menu switching, log query, recipe setting and other functions.
Alarm and Reminder
Display current system alarm, fault information, and warning codes;
Guide users to quickly troubleshoot and restore production.
Communication and remote management interface
Support communication with TEL main control system or PLC, real-time synchronization of data;
Compatible with TEL dedicated software interface or embedded control platform.
2.产 品 展 示
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ABB 3BHE046836R0101 GFD563A101控制器模块
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