TEL Tokyo Electron 1381-644-380-1传感器板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
TEL Tokyo Electron 1381-644-380-1 传感器板（Sensor Board）**是专为半导体制造设备设计的高精度信号采集模块，主要用于对设备运行环境或工艺状态的关键参数进行实时检测与反馈。此类模块在TEL的刻蚀、CVD、清洗等核心设备中发挥着非常重要的控制支持作用。
一、基本信息
产品名称：传感器板 / 传感器模块
型号：1381-644-380-1
制造商：Tokyo Electron Ltd. (TEL)
模块类型：高精度信号采集与处理板卡
安装位置：嵌入TEL设备控制柜或与执行部件（如加热器、泵、阀门）相连
二、主要功能
环境与工艺参数采集
实时采集温度、压力、气体流量、腔体真空度、RF功率等工艺数据。
信号调理与传输
对模拟/数字信号进行放大、滤波、电平转换等处理，并传输至主控系统。
工艺控制反馈
为PID回路、自动调整逻辑提供输入，支撑精确过程控制。
报警联动功能
超限或异常信号可触发报警、停机或安全联锁动作，确保设备与产品安全。
三、典型应用领域
该传感器板可广泛部署于以下TEL设备系统中：
Etching Systems（刻蚀系统）
监控腔体内压力、气体流量、等离子体状态等。CVD/ALD（化学气相沉积系统）
检测加热器温度、反应腔压强、 precursor输送情况。Track Systems（光刻胶处理设备）
用于显影液浓度、温控水路、烘烤区温度监控。Wet Clean / CMP（湿法清洗或化学机械研磨）
检测化学液流量、压力、PH值或腔体液位等。
英文资料：
TEL Tokyo Electron 1381-644-380-1 Sensor Board * * is a high-precision signal acquisition module designed specifically for semiconductor manufacturing equipment, mainly used for real-time detection and feedback of key parameters of equipment operating environment or process status. This type of module is etched in TEL CVD、 Cleaning and other core equipment play a very important role in control and support.
1、 Basic Information
Product Name: Sensor Board/Sensor Module
Model: 1381-644-380-1
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: high-precision signal acquisition and processing board
Installation location: Embedded in TEL equipment control cabinet or connected to executing components (such as heaters, pumps, valves)
2、 Main functions
Collection of environmental and process parameters
Real time collection of process data such as temperature, pressure, gas flow rate, chamber vacuum degree, RF power, etc.
Signal conditioning and transmission
Amplify, filter, and level convert analog/digital signals, and transmit them to the main control system.
Process control feedback
Provide input for PID circuits and automatic adjustment logic to support precise process control.
Alarm linkage function
Overlimit or abnormal signals can trigger alarms, shutdowns, or safety interlock actions to ensure the safety of equipment and products.
3、 Typical application areas
This sensor board can be widely deployed in the following TEL device systems:
Etching Systems
Monitor the pressure, gas flow rate, plasma state, etc. inside the chamber.
CVD/ALD (Chemical Vapor Deposition System)
Detect heater temperature, reaction chamber pressure, and precursor delivery status.
Track Systems (photoresist processing equipment)
Used for monitoring developer concentration, temperature controlled water circuit, and baking area temperature.
Wet Clean/CMP (wet cleaning or chemical mechanical polishing)
Detect chemical liquid flow rate, pressure, pH value, or chamber liquid level, etc.
2.产 品 展 示
3.其他产品
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