TEL Tokyo Electron 3M80-001239-11断路器模块 PDF资料
1.产 品 资 料 介 绍:
中文资料:
TEL Tokyo Electron 3M80-001239-11 断路器模块是一种应用于TEL半导体制造设备中的电气保护模块,其主要功能是对设备电源系统中的异常电流(如过载、短路)进行自动切断,以保护关键电路、控制系统和负载设备的运行安全。
一、基本信息
模块名称:断路器模块(Circuit Breaker Module)
型号:3M80-001239-11
制造商:Tokyo Electron Ltd.(TEL)
模块类型:机内配电与保护模块
安装位置:通常位于电气控制柜、功率分配板或主机电源输入处
二、核心功能
过载保护
当设备持续运行电流超过安全值时,自动断开电路,防止元件损坏或发热。
短路保护
在电路发生突发短路时,瞬时切断回路,避免电源系统崩溃或造成火灾风险。
支路分配控制
将主电源分配至多个子系统,如加热器、真空泵、RF电源、马达等,并分别提供独立保护。
联锁控制与远程复位功能(视版本而定)
与TEL主控系统联动,实现断电报警或PLC控制;部分型号支持远程重置功能。
英文资料:
The TEL Tokyo Electron 3M80-001239-11 circuit breaker module is an electrical protection module used in TEL semiconductor manufacturing equipment. Its main function is to automatically cut off abnormal currents (such as overload and short circuit) in the equipment power supply system to protect the safe operation of critical circuits, control systems, and load equipment.
1、 Basic Information
Module Name: Circuit Breaker Module
Model: 3M80-001239-11
Manufacturer: Tokyo Electron Ltd. (TEL)
Module type: In machine power distribution and protection module
Installation location: usually located at the electrical control cabinet, power distribution board, or host power input
2、 Core functions
overload protection
When the device continues to run and the current exceeds the safe value, it automatically disconnects the circuit to prevent component damage or heating.
Short circuit protection
In the event of a sudden short circuit in the circuit, instantly cut off the circuit to avoid power system collapse or the risk of fire.
Branch allocation control
Distribute the main power supply to multiple subsystems, such as heaters, vacuum pumps, RF power supplies, motors, etc., and provide independent protection for each.
Interlocking control and remote reset function (depending on version)
Linkage with TEL main control system to achieve power outage alarm or PLC control; Some models support remote reset function.
2.产 品 展 示
3.其他产品
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