TEL Tokyo Electron 381-64227-3数字量输入卡件 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：381-64227-3
产品名称：数字量输入卡件（Digital Input Card）
制造商：Tokyo Electron Limited（TEL，日本东京电子）
卡件类型：数字输入模块 / DI 板卡
版本号：-3（表示该卡件的第3个修订版或硬件版本）
二、主要功能
该卡件用于接收和处理来自现场设备的开关量信号（DI），是 TEL 控制系统中状态检测与事件触发的关键部件之一。
| 功能类别 | 描述 |
|---|---|
| 数字输入采集 | 接收按钮、限位开关、干接点传感器等的开关状态信号 |
| 状态上报 | 将输入状态反馈至主控制器，用于动作判断与流程逻辑执行 |
| 电气隔离保护 | 每个输入通道具备隔离电路，防止信号干扰、反灌电流 |
| 支持逻辑触发 | 输入信号可定义为常开（NO）或常闭（NC）逻辑，根据工艺需求配置 |
三、应用领域
该卡件主要用于 TEL 各类半导体制造设备中的数字状态监控和互锁控制系统，广泛应用于：
ACT 系列（光刻辅助设备）
监测腔体门状态、平台就位、晶圆存在、真空状态等开关量输入
Tactras 系列（蚀刻设备）
检测气体阀门状态、安全门开关、冷却水压力继电器状态
Trias 系列（沉积设备）
用于沉积工艺步骤中的安全互锁信号采集、电磁动作反馈信号接入
EFEM / Transfer / Load Port 模块
判断载片单元是否到位、卡匣门是否关闭、机械臂是否归位等状态
英文资料：
1、 Basic Information
Product model: 381-64227-3
Product Name: Digital Input Card
Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)
Card type: Digital input module/DI board
Version number: -3 (indicating the third revision or hardware version of the card)
2、 Main functions
This card is used to receive and process switch signals (DI) from field devices, and is one of the key components for state detection and event triggering in TEL control systems.
Functional category description
Digital input collects switch status signals of receiving buttons, limit switches, dry contact sensors, etc
Status reporting feeds back the input status to the main controller for action judgment and process logic execution
Electrical isolation protection: Each input channel is equipped with an isolation circuit to prevent signal interference and backflow current
Support logic triggering input signals can be defined as normally open (NO) or normally closed (NC) logic, configured according to process requirements
3、 Application Fields
This card is mainly used for digital status monitoring and interlock control systems in various semiconductor manufacturing equipment of TEL, and is widely used in:
ACT series (lithography auxiliary equipment)
Monitor the status of the chamber door, platform positioning, wafer presence, vacuum status, and other switch inputs
Tactras series (etching equipment)
Detect the status of gas valves, safety door switches, and cooling water pressure relays
Trias series (sedimentation equipment)
Used for safety interlock signal acquisition and electromagnetic action feedback signal access in sedimentation process steps
EFEM/Transfer/Load Port module
Determine whether the loading unit is in place, whether the cartridge door is closed, and whether the robotic arm is in place
2.产 品 展 示
3.其他产品
4.其他英文产品
ALSTOM 3EST125-975 DCC2382A Control Pane
Asea 2668-184-280 12 slot control board
HAAS 93-32-3550J Intelligent Driver
| SRF3643-4533-7-5-56C | SC402-023-TC | SC756B-001-02 |
| SRF3632-5265-84-5-56BC-CU | SC403-002 | SC752A-001-01 |
| SRF3632-5227-84-5-56BC-CU | SC403-013 | SC753A-010-02 |
| SR5348-4592-45B | SC403-012-T2 | SC943T200101 |
| SR5340-5370-4-45B | SC403-004-T3 | SC903NN-033-01 |
| SR489-P5-HI-A20 | SC402-037-T3 | SC903AN-001-01 |
| SR489-CASE | SC403-002-T4 | SC904NN-001-01 |
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