TEL Tokyo Electron CX81-50007-12数字量控制板卡 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：CX81-50007-12
产品名称：数字量控制板卡（Digital I/O Control Board）
制造商：Tokyo Electron Limited（TEL，日本东京电子）
模块类型：工业级数字输入/输出控制板
版本号：-12（表明此为第12版设计或修订）
二、主要功能
该控制板属于 TEL 系统中用于数字量信号处理和控制的核心模块，承担如下任务：
| 功能类别 | 描述 |
|---|---|
| 数字输入采集 | 接收按钮、限位开关、状态反馈器件等开关量信号 |
| 数字输出控制 | 驱动继电器、电磁阀、报警器、指示灯等数字执行器件 |
| I/O状态监测 | 实时采集输入/输出通道状态，并向主控反馈 |
| 信号隔离与保护 | 输入/输出端具备隔离保护机制，防止过压、反接等情况 |
| 逻辑执行支持 | 配合主控逻辑参与设备流程控制和安全互锁处理 |
三、应用领域
该数字控制板主要用于 TEL 半导体设备中的动作控制与状态反馈子系统，常见于：
ACT 系列光刻前后处理设备
控制喷头升降、腔体门开关、热板就位、晶圆探测等数字信号流程
Tactras / Trias 系列蚀刻或沉积设备
控制气阀、真空门、冷却系统、RF电源互锁回路等
Transfer / Load Port 系统
控制晶圆搬运机构的位置锁定、真空状态确认等操作逻辑
英文资料：
1、 Basic Information
Product Model: CX81-50007-12
Product Name: Digital I/O Control Board
Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)
Module type: Industrial grade digital input/output control board
Version number: -12 (indicating this is the 12th design or revision)
2、 Main functions
This control board belongs to the core module used for digital signal processing and control in the TEL system, and is responsible for the following tasks:
Functional category description
Digital input acquisition and reception buttons, limit switches, status feedback devices, and other switch signals
Digital output control drives digital actuators such as relays, solenoid valves, alarms, indicator lights, etc
I/O status monitoring collects real-time input/output channel status and provides feedback to the main control
Signal isolation and protection input/output terminals have isolation protection mechanisms to prevent overvoltage, reverse connection, and other situations
Logic execution supports cooperation with the main control logic to participate in device process control and security interlock processing
3、 Application Fields
This digital control board is mainly used for action control and status feedback subsystems in TEL semiconductor equipment, commonly found in:
ACT series lithography pre-processing and post-processing equipment
Control the digital signal process of nozzle lifting, chamber door opening and closing, hot plate positioning, wafer detection, etc
Tactras/Trias series etching or deposition equipment
Control air valves, vacuum valves, cooling systems, RF power interlock circuits, etc
Transfer/Load Port System
Control the position locking and vacuum status confirmation of the wafer handling mechanism and other operational logic
2.产 品 展 示
3.其他产品
4.其他英文产品
Gespac GESOUT-3 OUT-3B Controller Module
GE IS210AEBIH1BED interface card module
Kollmorgen MMC-SD-0.5-230-D servo drive
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