TEL Tokyo Electron BX80-070382-13接口模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：BX80-070382-13
产品名称：接口模块（Interface Module）
制造商：Tokyo Electron Limited（TEL）
模块类别：信号接口转换及通信模块
版本号：-13（表示该模块的第13版硬件或固件修订）
二、主要功能
该接口模块主要用于设备内部不同控制系统之间的信号转换、接口扩展及通信桥接，功能包括：
| 功能分类 | 描述 |
|---|---|
| 信号转换 | 将多种输入信号格式转换为设备可识别的标准信号 |
| 接口扩展 | 扩展设备的输入输出端口数量，支持更多传感器和执行器 |
| 通信桥接 | 支持多种工业通信协议，实现不同系统间数据互通 |
| 信号隔离 | 电气隔离防止干扰，确保信号传输稳定可靠 |
| 状态指示 | 具备LED等指示灯，实时显示模块工作状态与故障信息 |
三、典型应用领域
此模块常用于 TEL 半导体制造设备中的复杂控制系统，包括：
光刻设备前后处理系统（如 ACT 系列）
连接传感器、执行机构及上位控制系统，协调工艺动作
蚀刻与沉积设备（如 Tactras、Trias）
实现气体流量控制、真空监测、温度采集等子系统接口
搬运及自动化模块
机械臂控制、门禁联锁、报警系统的信号集中管理
英文资料：
1、 Basic Information
Product model: BX80-070382-13
Product Name: Interface Module
Manufacturer: Tokyo Electron Limited (TEL)
Module category: Signal interface conversion and communication module
Version number: -13 (indicating the 13th hardware or firmware revision of the module)
2、 Main functions
This interface module is mainly used for signal conversion, interface expansion, and communication bridging between different control systems within the device. Its functions include:
Functional classification description
Signal conversion converts multiple input signal formats into standard signals recognizable by the device
Interface expansion expands the number of input and output ports for devices, supporting more sensors and actuators
Communication bridging supports multiple industrial communication protocols to achieve data interoperability between different systems
Signal isolation and electrical isolation prevent interference, ensuring stable and reliable signal transmission
The status indicator is equipped with LED and other indicator lights, which display the real-time working status and fault information of the module
3、 Typical application areas
This module is commonly used in complex control systems in TEL semiconductor manufacturing equipment, including:
Pre - and post-processing systems for lithography equipment (such as ACT series)
Connect sensors, actuators, and upper control systems to coordinate process actions
Etching and deposition equipment (such as Tactras, Trias)
Implement interfaces for subsystems such as gas flow control, vacuum monitoring, and temperature acquisition
Handling and automation module
Centralized management of signals for robotic arm control, access control interlocking, and alarm systems
2.产 品 展 示
3.其他产品
KOLLMORGEN S70602-PBNANA 伺服驱动控制器
4.其他英文产品
ABB UN0503a-P Digital Output Module
GESAS CAN-DCM digital amplifier module
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| UR8FH | CACR-SR10BZ1SF | 60-0504-03 |
| UR8AH | CACR-HR10BAB | 4598-006-60813 |
| UR6UH | CACR-SK300AAB, | 067-02121-0003 |
| UR6TH | CACR-SR20SB1BF-Y100 | 0660-01847 |
| UR6PH | CACR-IR44SFB | EXP-MX250 |
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