TEL Tokyo Electron 3D81-000037-41信号继电器模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：3D81-000037-41
产品名称：信号继电器模块（Signal Relay Module）
制造商：Tokyo Electron Limited（TEL，日本东京电子）
模块类型：电气控制模块 / 隔离继电器板
版本号：-41（代表该模块的第 41 个版本或定制版本）
二、主要功能
该模块主要用于在 TEL 设备中进行信号的隔离、转换与控制驱动，常用于将低压控制信号转换为设备级别的开关控制信号。
| 功能分类 | 描述 |
|---|---|
| 信号隔离 | 通过继电器实现控制信号与执行回路的电气隔离 |
| 信号放大驱动 | 将微弱的控制信号（来自主控或 PLC）转换为大电流控制信号 |
| 状态切换 | 控制电磁阀、接触器、指示灯、警报器等设备开关状态 |
| 保护作用 | 防止外部电压尖峰、浪涌电流直接影响主控制系统 |
| 逻辑控制 | 支持常开（NO）/常闭（NC）控制逻辑，适配多种工作场景 |
三、典型应用领域
该模块通常用于 TEL 的复杂半导体设备中，典型用途包括：
涂胶显影设备（如 ACT 系列）
控制喷胶系统、平台升降、干燥加热等动作的电气执行回路
蚀刻与沉积设备（如 Tactras / Trias 系列）
控制真空阀门、气体流路选择器、电源切换器等关键执行单元
真空传输模块 / Load Port 系统
实现门控系统、电磁门锁、气动控制组件的开关隔离控制
英文资料：
1、 Basic Information
Product model: 3D81-000037-41
Product Name: Signal Relay Module
Manufacturer: Tokyo Electron Limited (TEL, Tokyo Electronics, Japan)
Module Type: Electrical Control Module/Isolation Relay Board
Version number: -41 (representing the 41st version or customized version of the module)
2、 Main functions
This module is mainly used for signal isolation, conversion, and control driving in TEL devices, commonly used to convert low-voltage control signals into device level switch control signals.
Functional classification description
Signal isolation is achieved through relays to electrically isolate control signals from execution circuits
Signal amplification driver converts weak control signals (from the main control or PLC) into high current control signals
State switching controls the on/off status of equipment such as solenoid valves, contactors, indicator lights, alarms, etc
Protective function to prevent external voltage spikes and surge currents from directly affecting the main control system
Logic control supports normally open (NO)/normally closed (NC) control logic, suitable for various work scenarios
3、 Typical application areas
This module is commonly used in complex semiconductor equipment of TEL, with typical applications including:
Adhesive coating and developing equipment (such as ACT series)
Electrical execution circuit for controlling actions such as spraying system, platform lifting, drying and heating
Etching and deposition equipment (such as Tactras/Trias series)
Control key execution units such as vacuum valves, gas flow path selectors, power switches, etc
Vacuum transmission module/Load Port system
Implement switch isolation control for door control systems, electromagnetic door locks, and pneumatic control components
2.产 品 展 示
3.其他产品
ABB UFC760BE142 3BHE004573R0142 控制器模块
4.其他英文产品
ABB UN0807C-P Programmable Controller
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