TEL Tokyo Electron 2180-020950-11控制主板模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：2180-020950-11
产品名称：控制主板模块（Main Control Board Module）
制造商：Tokyo Electron Limited（TEL）
模块类别：中央处理控制板 / 系统主控模块
版本编号：-11（代表该主板的第 11 个版本修订）
二、主要功能
该模块是 TEL 设备中的核心控制组件之一，承担整机工艺、动作流程和信号处理的主要任务。
| 功能分类 | 说明 |
|---|---|
| 中央控制功能 | 作为设备的“大脑”，执行主程序、动作逻辑和设备状态控制 |
| 接口管理 | 管理输入输出模块、传感器、驱动器、通信单元等子系统的交互 |
| 数据处理 | 实时处理采集数据，进行计算、判断和决策输出 |
| 通讯桥接 | 支持 TEL 专用总线、RS232/485、CAN、Ethernet 等接口与上位机通讯 |
| 安全与联锁 | 处理安全互锁、急停逻辑、故障诊断和日志记录 |
三、典型应用领域
该控制主板模块广泛应用于以下 TEL 设备中作为主控平台：
ACT 系列光刻辅助处理设备
例如 ACT8、ACT12、ACT18，用于控制涂胶、显影、预烘后烘等工艺步骤
Tactras 系列蚀刻设备
控制腔体气体流量、真空、RF 功率与温控系统协调工作
Trias SPA / Trias TI 系列 CVD/ALD 沉积设备
进行多步骤温控、气体混合、沉积时间序列的控制
Loadport、Transfer、EFEM 模块
控制晶圆搬运路径、机械臂位置与联动保护逻辑
英文资料：
1、 Basic Information
Product model: 2180-020950-11
Product Name: Main Control Board Module
Manufacturer: Tokyo Electron Limited (TEL)
Module Category: Central Processing Control Board/System Main Control Module
Version number: -11 (representing the 11th revision of this motherboard)
2、 Main functions
This module is one of the core control components in TEL equipment, responsible for the main tasks of overall process, action flow, and signal processing.
Functional classification description
The central control function serves as the "brain" of the device, executing the main program, action logic, and device status control
Interface management manages the interaction between subsystems such as input/output modules, sensors, drivers, and communication units
Real time processing of collected data for calculation, judgment, and decision output
Communication bridging supports communication between TEL dedicated bus, RS232/485, CAN, Ethernet and other interfaces with the upper computer
Safety and Interlocking Handling: Safety Interlocking, Emergency Stop Logic, Fault Diagnosis, and Logging
3、 Typical application areas
This control motherboard module is widely used as the main control platform in the following TEL devices:
ACT series lithography auxiliary processing equipment
For example, ACT8, ACT12, ACT18 are used to control the process steps of gluing, developing, pre drying, and post drying
Tactras series etching equipment
Coordinate the control of chamber gas flow rate, vacuum, RF power, and temperature control system
Trias SPA/Trias TI series CVD/ALD deposition equipment
Perform multi-step temperature control, gas mixing, and sedimentation time series control
Loadport, Transfer, EFEM modules
Control wafer handling path, robotic arm position, and linkage protection logic
2.产 品 展 示
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