TEL Tokyo Electron 3208-000036-13印刷电路板 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：3208-000036-13
产品名称：印刷电路板（Printed Circuit Board, PCB）
制造商：Tokyo Electron Limited（TEL）
板卡类别：控制/接口用途 PCB
版本编号：-13（表示该电路板的第13版修订，可能对应不同设备版本或功能增强）
二、主要功能（依据TEL编号结构及使用惯例推测）
该 PCB 是 TEL 半导体设备中的控制或接口类电路板，主要用途包括：
| 功能类型 | 描述 |
|---|---|
| 信号传输 | 实现各子系统或模块间的数字/模拟信号连接与转换 |
| 功能扩展 | 为主控制系统提供外部设备接口支持（如I/O扩展、通信中继等） |
| 设备控制 | 包含逻辑电路或微控制器，用于控制执行机构或处理传感器信号 |
| 电源调配 | 部分板卡集成电源稳压、电压转换等辅助功能 |
三、典型应用领域
该型号 PCB 可能应用于以下设备或子系统中（具体以设备配置为准）：
光刻机辅助系统（如 ACT 系列）
控制喷涂头、冷却平台、加热元件等动作或反馈
蚀刻与薄膜沉积系统（如 Tactras、Trias 系列）
管理气体阀门、真空泵、加热腔体等子系统的电控信号
搬运/真空传输模块
控制真空门、转台、电磁锁、位置传感器等部件
英文资料：
1、 Basic Information
Product Model: 3208-000036-13
Product Name: Printed Circuit Board (PCB)
Manufacturer: Tokyo Electron Limited (TEL)
Board type: Control/Interface purpose PCB
Version number: -13 (indicating the 13th revision of this circuit board, which may correspond to different device versions or feature enhancements)
2、 Main functions (inferred based on TEL numbering structure and usage conventions)
This PCB is a control or interface circuit board in TEL semiconductor equipment, mainly used for:
Function type description
Signal transmission enables the connection and conversion of digital/analog signals between various subsystems or modules
Function expansion provides external device interface support for the main control system (such as I/O expansion, communication relay, etc.)
Equipment control includes logic circuits or microcontrollers used to control actuators or process sensor signals
The power allocation board integrates auxiliary functions such as power stabilization and voltage conversion
3、 Typical application areas
This PCB model may be used in the following devices or subsystems (depending on the device configuration):
Lithography machine auxiliary system (such as ACT series)
Control the actions or feedback of spray nozzles, cooling platforms, heating elements, etc
Etching and thin film deposition systems (such as Tactras, Trias series)
Manage the electrical control signals of subsystems such as gas valves, vacuum pumps, and heating chambers
Transport/Vacuum Transfer Module
Control components such as vacuum doors, turntables, electromagnetic locks, position sensors, etc
2.产 品 展 示
3.其他产品
ABB 3BHE046836R0101 GFD563A101控制器模块
4.其他英文产品
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ASEA DSQC223 Robot Control Board
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