TEL Tokyo Electron 381-640994-2控制单元 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：381-640994-2
产品名称：控制单元（Control Unit）
制造商：Tokyo Electron Limited（TEL）
部件类别：主控制或分布式控制模块
版本号：-2（代表该控制单元的特定硬件修订）
二、主要功能
该控制单元是 TEL 半导体设备中的核心控制组件之一，通常承担以下任务：
| 功能分类 | 说明 |
|---|---|
| 设备主控 | 处理来自上位系统的命令，控制设备运行流程和执行状态 |
| 信号协调 | 管理并协调多个输入/输出模块的数据传输与控制指令 |
| 工艺逻辑控制 | 根据预设工艺步骤，发出启动、加热、真空、气体流等动作控制 |
| 通信桥接 | 连接 HMI、上位机、传感器和执行器等模块，实现数据交互 |
| 故障处理 | 检测异常状态并触发报警、停机或自保护机制 |
三、典型应用领域
此类控制单元广泛用于 TEL 的晶圆处理设备中，具体包括：
光刻前后处理设备（如 Clean Track ACT 系列）
控制显影臂动作、升降台、喷涂系统和干燥加热单元等CVD / Etch 系统（如 Tactras、Trias 系列）
管理温度、真空、气体控制回路等复杂工艺子系统搬运/真空系统（Loadport / Transfer Modules）
协调机械手、腔体门、气密系统等模块的动作时序和互锁逻辑
英文资料：
1、 Basic Information
Product model: 381-640994-2
Product Name: Control Unit
Manufacturer: Tokyo Electron Limited (TEL)
Component category: Main control or distributed control module
Version number: -2 (representing specific hardware revisions for this control unit)
2、 Main functions
This control unit is one of the core control components in TEL semiconductor equipment, typically responsible for the following tasks:
Functional classification description
The device master controls the operation process and execution status of the device by processing commands from the upper system
Signal coordination management and coordination of data transmission and control instructions for multiple input/output modules
Process logic control: Based on preset process steps, control actions such as startup, heating, vacuum, gas flow, etc. are issued
Communication bridging connects modules such as HMI, upper computer, sensors, and actuators to achieve data exchange
Fault handling detects abnormal states and triggers alarm, shutdown or self-protection mechanisms
3、 Typical application areas
This type of control unit is widely used in TEL's wafer processing equipment, including:
Photolithography pre-processing and post-processing equipment (such as Clean Track ACT series)
Control the action of the developing arm, lifting platform, spraying system, and drying heating unit, etc
CVD/Etch systems (such as Tactras, Trias series)
Manage complex process subsystems such as temperature, vacuum, and gas control circuits
Loading port/Transfer modules
Coordinate the action timing and interlock logic of modules such as robotic arms, chamber doors, and airtight systems
2.产 品 展 示
3.其他产品
ABB 3BHE046836R0101 GFD563A101控制器模块
4.其他英文产品
KOLLMORGEN CP310250 servo driver
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| 073-650043-00 | 531X302DCIBBG1 | 03-287865-00 |
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