TEL Tokyo Electron MPC-T0070A-14数字输入模块 PDF资料
1.产 品 资 料 介 绍：
中文资料：
一、基本信息
产品型号：MPC-T0070A-14
产品名称：数字输入模块（Digital Input Module）
制造商：Tokyo Electron Limited（TEL）
模块类别：工业控制用 I/O 接口板（输入专用）
版本号：-14 表示该模块的第 14 个硬件修订版本，适配特定设备或系统平台
二、主要功能
该模块用于采集现场的数字信号，为设备控制系统提供关键状态反馈：
| 功能项 | 描述 |
|---|---|
| 开关量采集 | 采集设备中按钮、限位开关、接近传感器等的状态信号（如开/关） |
| 状态监测 | 实时监测系统中的门状态、安全锁、机械位置等二进制状态信息 |
| 信号隔离 | 模块自带光耦或电子隔离设计，防止外部干扰传导入主控系统 |
| 输入滤波 | 对机械抖动或瞬态干扰进行滤波，提升信号稳定性与准确性 |
| 系统通信 | 将输入信号编码并通过总线协议发送至上位控制系统 |
三、典型应用场景
该模块广泛用于 TEL 各类半导体设备中作为状态检测前端单元，如：
ACT 系列光刻前处理设备
检测载片台状态、气动门开关、晶圆在位信号等
Tactras 系列蚀刻系统
采集腔体门锁开闭、真空状态检测开关、故障信号反馈
Trias 系列沉积系统
检测炉体机械运动状态、气体通断反馈、冷却通道反馈信号等
英文资料：
1、 Basic Information
Product model: MPC-T0070A-14
Product Name: Digital Input Module
Manufacturer: Tokyo Electron Limited (TEL)
Module category: Industrial control I/O interface board (input specific)
Version number: -14 represents the 14th hardware revision version of the module, adapted to specific devices or system platforms
2、 Main functions
This module is used to collect digital signals on site and provide critical status feedback for the equipment control system
Function item description
Status signals (such as on/off) of buttons, limit switches, proximity sensors, etc. in switch quantity acquisition devices
Real time monitoring system for binary status information such as door status, safety lock, mechanical position, etc
The signal isolation module comes with an optocoupler or electronic isolation design to prevent external interference from being transmitted into the main control system
Input filtering is used to filter mechanical jitter or transient interference, improving signal stability and accuracy
The system communication encodes the input signal and sends it to the upper control system through the bus protocol
3、 Typical application scenarios
This module is widely used as a front-end unit for state detection in various semiconductor devices of TEL, such as:
ACT series lithography pre-processing equipment
Detect the status of the wafer stage, pneumatic door switch, wafer in position signal, etc
Tactras series etching system
Collect chamber door lock opening and closing, vacuum status detection switch, and fault signal feedback
Trias series sedimentary system
Detecting the mechanical motion status of the furnace body, gas on/off feedback, cooling channel feedback signals, etc
2.产 品 展 示
3.其他产品
ABB 3BHE046836R0101 GFD563A101控制器模块
4.其他英文产品
AFP9075355 3BHS537443 voltage regulator
ASEA DSCA121 Robot Control Board
KOLLMORGEN CP310250 servo driver
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